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Scott D. Habermehl
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Corrales, NM, US
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last 30 patents
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Patent Grant
Hybrid CMOS-MEMS devices adapted for high-temperature operation and...
Patent number
10,214,415
Issue date
Feb 26, 2019
National Technology & Engineering Solutions of Sandia, LLC
Benjamin Griffin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods of depositing an alpha-silicon-carbide-containing film at l...
Patent number
9,546,420
Issue date
Jan 17, 2017
Sandia Corporation
Scott D. Habermehl
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Antifuse with a single silicon-rich silicon nitride insulating layer
Patent number
8,357,994
Issue date
Jan 22, 2013
Sandia Corporation
Scott D. Habermehl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for fabricating a microelectromechanical structure
Patent number
6,808,952
Issue date
Oct 26, 2004
Sandia Corporation
Jeffry J. Sniegowski
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Use of silicon oxynitride as a sacrificial material for microelectr...
Patent number
6,174,820
Issue date
Jan 16, 2001
Sandia Corporation
Scott D. Habermehl
B81 - MICRO-STRUCTURAL TECHNOLOGY