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Scott Dunham
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Preparing a semiconductor surface for epitaxial deposition
Patent number
9,793,104
Issue date
Oct 17, 2017
Aixtron SE
Maxim Kelman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for providing uniform gas delivery to substrat...
Patent number
7,018,940
Issue date
Mar 28, 2006
Genus, Inc.
Scott William Dunham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma generator assembly for use in CVD and PECVD processes
Patent number
6,626,998
Issue date
Sep 30, 2003
Genus, Inc.
Scott William Dunham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for providing uniform gas delivery to substrat...
Patent number
6,616,766
Issue date
Sep 9, 2003
Genus, Inc.
Scott William Dunham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for providing uniform gas delivery to substrates in CVD and...
Patent number
6,284,673
Issue date
Sep 4, 2001
Genus Inc.
Scott William Dunham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for providing uniform gas delivery to substrat...
Patent number
6,206,972
Issue date
Mar 27, 2001
Genus, Inc.
Scott William Dunham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
TRANSFER MODULE FOR A MULTI-MODULE APPARATUS
Publication number
20170125269
Publication date
May 4, 2017
AIXTRON SE
Scott Dunham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PREPARING A SEMICONDUCTOR SURFACE FOR EPITAXIAL DEPOSITION
Publication number
20160225608
Publication date
Aug 4, 2016
AIXTRON
Maxim Kelman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for providing uniform gas delivery to substrat...
Publication number
20040127067
Publication date
Jul 1, 2004
Scott William Dunham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and apparatus for providing uniform gas delivery to substrat...
Publication number
20030101934
Publication date
Jun 5, 2003
Scott William Dunham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and apparatus for providing uniform gas delivery to substrat...
Publication number
20010054391
Publication date
Dec 27, 2001
Scott William Dunham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and apparatus for providing uniform gas delivery to substrat...
Publication number
20010002582
Publication date
Jun 7, 2001
Scott William Dunham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...