Scott Edward Beck

Person

Kutztown, PA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Halogen addition for improved adhesion of CVD copper to barrier
- Patent number 6,783,868
- Issue date Aug 31, 2004
- Air Products and Chemicals, Inc.
- Ralph J. Ciotti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Organosilicon precursors for interlayer dielectric films with low d...
- Patent number 6,583,048
- Issue date Jun 24, 2003
- Air Products and Chemicals, Inc.
- Jean Louise Vincent
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to remove metal and silicon oxide during gas-phase sacrifici...
- Patent number 6,534,413
- Issue date Mar 18, 2003
- Air Products and Chemicals, Inc.
- Eric Anthony Robertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Halogen addition for improved adhesion of CVD copper to barrier
- Patent number 6,509,266
- Issue date Jan 21, 2003
- Air Products and Chemicals, Inc.
- Ralph J. Ciotti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas phase removal of SiO.sub.2 /metals from silicon
- Patent number 6,159,859
- Issue date Dec 12, 2000
- Air Products and Chemicals, Inc.
- Eric Anthony Robertson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for plasma etching or cleaning with diluted NF.sub.3
- Patent number 5,413,670
- Issue date May 9, 1995
- Air Products and Chemicals, Inc.
- John G. Langan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Halogen addition for improved adhesion of CVD copper to barrier
- Publication number 20030104695
- Publication date Jun 5, 2003
- Ralph J. Ciotti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ORGANOSILICON PRECURSORS FOR INTERLAYER DIELECTRIC FILMS WITH LOW D...
- Publication number 20020142579
- Publication date Oct 3, 2002
- Jean Louise Vincent
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Scott Edward Beck

Person

Patents Grantslast 30 patents

Halogen addition for improved adhesion of CVD copper to barrier

Organosilicon precursors for interlayer dielectric films with low d...

Method to remove metal and silicon oxide during gas-phase sacrifici...

Halogen addition for improved adhesion of CVD copper to barrier

Gas phase removal of SiO.sub.2 /metals from silicon

Method for plasma etching or cleaning with diluted NF.sub.3

Patents Applicationslast 30 patents

Halogen addition for improved adhesion of CVD copper to barrier

ORGANOSILICON PRECURSORS FOR INTERLAYER DIELECTRIC FILMS WITH LOW D...