Scott J. Fields

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Hollister, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
High temperature electrostatic chuck with radial thermal chokes
- Patent number 9,337,067
- Issue date May 10, 2016
- Novellus Systems, Inc.
- Shambhu N. Roy
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HIGH TEMPERATURE ELECTROSTATIC CHUCK WITH RADIAL THERMAL CHOKES
- Publication number 20120285658
- Publication date Nov 15, 2012
- Shambhu N. Roy
- H01 - BASIC ELECTRIC ELEMENTS