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Scott KENNY
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Ballston Lake, NY, US
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last 30 patents
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Patent Grant
Uniformity control of metal-based photoresists
Patent number
10,996,564
Issue date
May 4, 2021
GLOBALFOUNDRIES U.S. INC.
Robert Finlay
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
UNIFORMITY CONTROL OF METAL-BASED PHOTORESISTS
Publication number
20190212651
Publication date
Jul 11, 2019
GLOBALFOUNDRIES INC.
Robert FINLAY
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...