Scott L. Battle

Person

  • Cedar Park, TX, US

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    TUNGSTEN PRECURSORS AND RELATED METHODS

    • Publication number 20240116774
    • Publication date Apr 11, 2024
    • Entegris, Inc.
    • Loren Press
    • C01 - INORGANIC CHEMISTRY
  • Information Patent Application

    VAPORIZATION VESSEL AND METHOD

    • Publication number 20240084452
    • Publication date Mar 14, 2024
    • Entegris, Inc.
    • Bryan C. HENDRIX
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VIBRATION FILL PROCESS FOR SOLID CHEMISTRIES

    • Publication number 20240002081
    • Publication date Jan 4, 2024
    • Entegris, Inc.
    • Benjamin H. Olson
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Application

    MODULES FOR DELIVERY SYSTEMS AND RELATED METHODS

    • Publication number 20230416913
    • Publication date Dec 28, 2023
    • Entegris, Inc.
    • Bryan C. Hendrix
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILTRATION IN A VAPOR DELIVERY SYSTEM

    • Publication number 20230390680
    • Publication date Dec 7, 2023
    • Entegris, Inc.
    • Scott L. Battle
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    TRAY ASSEMBLIES FOR PRECURSOR DELIVERY SYSTEMS AND RELATED METHODS

    • Publication number 20230366085
    • Publication date Nov 16, 2023
    • Entegris, Inc.
    • Benjamin Harrison Olson
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SYSTEMS AND METHODS FOR CONTROLLING PRECURSOR DELIVERY

    • Publication number 20230298909
    • Publication date Sep 21, 2023
    • Entegris, Inc.
    • Michael Watson
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEVICES AND METHOD FOR DELIVERING MOLYBDENUM VAPOR

    • Publication number 20230287564
    • Publication date Sep 14, 2023
    • Entegris, Inc.
    • Bryan C. Hendrix
    • C01 - INORGANIC CHEMISTRY
  • Information Patent Application

    HIGH VAPOR PRESSURE DELIVERY SYSTEM

    • Publication number 20230130079
    • Publication date Apr 27, 2023
    • Entegris, Inc.
    • Scott L. Battle
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    COMPRESSIBLE TRAY FOR SOLID CHEMICAL VAPORIZING CHAMBER

    • Publication number 20230115177
    • Publication date Apr 13, 2023
    • Entegris, Inc.
    • Scott L. Battle
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PRECURSOR DELIVERY SYSTEMS FOR DETERMINING MATERIAL LEVELS

    • Publication number 20230113646
    • Publication date Apr 13, 2023
    • Entegris, Inc.
    • Scott L. Battle
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MODULAR TRAY FOR SOLID CHEMICAL VAPORIZING CHAMBER

    • Publication number 20230112884
    • Publication date Apr 13, 2023
    • Entegris, Inc.
    • Scott L. Battle
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VAPORIZER ASSEMBLY

    • Publication number 20230062455
    • Publication date Mar 2, 2023
    • Entegris, Inc.
    • Benjamin Cardozo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CHEMICAL DELIVERY SYSTEM AND METHOD OF OPERATING THE CHEMICAL DELIV...

    • Publication number 20220298629
    • Publication date Sep 22, 2022
    • Entegris, Inc.
    • David James Eldridge
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBLIMATION AMPOULE WITH LEVEL SENSING

    • Publication number 20210123134
    • Publication date Apr 29, 2021
    • Entegris, Inc.
    • John N. GREGG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VAPORIZATION VESSEL AND METHOD

    • Publication number 20200340110
    • Publication date Oct 29, 2020
    • Entegris, Inc.
    • Bryan C. HENDRIX
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    AMPOULE VAPORIZER AND VESSEL

    • Publication number 20190186003
    • Publication date Jun 20, 2019
    • Entegris, Inc.
    • David James ELDRIDGE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CHEMICAL DELIVERY SYSTEM AND METHOD OF OPERATING THE CHEMICAL DELIV...

    • Publication number 20190177840
    • Publication date Jun 13, 2019
    • Entegris, Inc.
    • David James ELDRIDGE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HEAT TRANSFER TO AMPOULE TRAYS

    • Publication number 20190120433
    • Publication date Apr 25, 2019
    • Entegris, Inc.
    • Bryan C. HENDRIX
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HIGH-PURITY TUNGSTEN HEXACARBONYL FOR SOLID SOURCE DELIVERY

    • Publication number 20180044787
    • Publication date Feb 15, 2018
    • Entegris, Inc.
    • Thomas H. BAUM
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SOLID VAPORIZER

    • Publication number 20170342557
    • Publication date Nov 30, 2017
    • Entegris, Inc.
    • Thomas H. BAUM
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SOLID PRECURSOR-BASED DELIVERY OF FLUID UTILIZING CONTROLLED SOLIDS...

    • Publication number 20170037511
    • Publication date Feb 9, 2017
    • Entegris, Inc.
    • John M. Cleary
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    COBALT CVD

    • Publication number 20170032973
    • Publication date Feb 2, 2017
    • Entegris, Inc.
    • Thomas H. Baum
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED...

    • Publication number 20170029946
    • Publication date Feb 2, 2017
    • Entegris, Inc.
    • John N. Gregg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    COBALT PRECURSORS

    • Publication number 20160369402
    • Publication date Dec 22, 2016
    • Entegris, Inc.
    • Thomas H. Baum
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED...

    • Publication number 20150337436
    • Publication date Nov 26, 2015
    • Entegris, Inc.
    • John N. Gregg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FLUORINE FREE TUNGSTEN ALD/CVD PROCESS

    • Publication number 20150251920
    • Publication date Sep 10, 2015
    • Entegris, Inc.
    • Weimin Li
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED...

    • Publication number 20150218696
    • Publication date Aug 6, 2015
    • Entegris, Inc.
    • John N. Gregg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SOURCE REAGENT-BASED DELIVERY OF FLUID WITH HIGH MATERIAL FLUX FOR...

    • Publication number 20150191819
    • Publication date Jul 9, 2015
    • Bryan C. Hendrix
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SOLID PRECURSOR-BASED DELIVERY OF FLUID UTILIZING CONTROLLED SOLIDS...

    • Publication number 20140329025
    • Publication date Nov 6, 2014
    • John M. Cleary
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...