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VAPORIZATION VESSEL AND METHOD
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Publication number 20240084452
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Publication date Mar 14, 2024
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Entegris, Inc.
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Bryan C. HENDRIX
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FILTRATION IN A VAPOR DELIVERY SYSTEM
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Publication number 20230390680
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Publication date Dec 7, 2023
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Entegris, Inc.
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Scott L. Battle
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B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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HIGH VAPOR PRESSURE DELIVERY SYSTEM
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Publication number 20230130079
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Publication date Apr 27, 2023
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Entegris, Inc.
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Scott L. Battle
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VAPORIZER ASSEMBLY
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Publication number 20230062455
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Publication date Mar 2, 2023
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Entegris, Inc.
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Benjamin Cardozo
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SUBLIMATION AMPOULE WITH LEVEL SENSING
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Publication number 20210123134
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Publication date Apr 29, 2021
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Entegris, Inc.
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John N. GREGG
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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VAPORIZATION VESSEL AND METHOD
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Publication number 20200340110
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Publication date Oct 29, 2020
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Entegris, Inc.
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Bryan C. HENDRIX
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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AMPOULE VAPORIZER AND VESSEL
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Publication number 20190186003
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Publication date Jun 20, 2019
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Entegris, Inc.
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David James ELDRIDGE
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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HEAT TRANSFER TO AMPOULE TRAYS
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Publication number 20190120433
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Publication date Apr 25, 2019
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Entegris, Inc.
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Bryan C. HENDRIX
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SOLID VAPORIZER
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Publication number 20170342557
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Publication date Nov 30, 2017
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Entegris, Inc.
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Thomas H. BAUM
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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COBALT CVD
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Publication number 20170032973
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Publication date Feb 2, 2017
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Entegris, Inc.
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Thomas H. Baum
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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COBALT PRECURSORS
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Publication number 20160369402
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Publication date Dec 22, 2016
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Entegris, Inc.
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Thomas H. Baum
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FLUORINE FREE TUNGSTEN ALD/CVD PROCESS
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Publication number 20150251920
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Publication date Sep 10, 2015
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Entegris, Inc.
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Weimin Li
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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