Scott Petersen

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Scotts Valley, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Integrated megasonic cascade scrubber module and process
- Patent number 7,516,507
- Issue date Apr 14, 2009
- Xyratex Technologies, Ltd.
- Michael Oxsen
- G11 - INFORMATION STORAGE
Information Patent Grant
Disk cascade scrubber
- Patent number 6,625,835
- Issue date Sep 30, 2003
- Lam Research Corporation
- David T. Frost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer drying apparatus and method
- Patent number 6,615,510
- Issue date Sep 9, 2003
- Lam Research Corporation
- Oliver David Jones
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cascade scrubber
- Patent number 6,588,043
- Issue date Jul 8, 2003
- Lam Research Corporation
- David T. Frost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for drying batches of disks
- Patent number 6,477,786
- Issue date Nov 12, 2002
- Lam Research Corporation
- Oliver David Jones
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Disk drying apparatus and method
- Patent number 6,446,355
- Issue date Sep 10, 2002
- Lam Research Corporation
- Oliver David Jones
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for drying batches of wafers
- Patent number 6,430,841
- Issue date Aug 13, 2002
- Lam Research Corporation
- Jonathan Borkowski
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Wafer drying apparatus and method
- Publication number 20030000102
- Publication date Jan 2, 2003
- Lam Research Corporation
- Oliver David Jones
- H01 - BASIC ELECTRIC ELEMENTS