Scott R. Chegwidden

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Mountain View, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Dual-layer EUV mask absorber with trenches having opposing sidewall...
- Patent number 7,410,733
- Issue date Aug 12, 2008
- Intel Corporation
- Pei-Yang Yan
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Double-metal EUV mask absorber
- Patent number 6,913,706
- Issue date Jul 5, 2005
- Intel Corporation
- Pei-Yang Yan
- C03 - GLASS MINERAL OR SLAG WOOL

Patents Applicationslast 30 patents

Information Patent Application
Double-metal EUV mask absorber
- Publication number 20050227152
- Publication date Oct 13, 2005
- Pei-Yang Yan
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
Double-metal EUV mask absorber
- Publication number 20040124174
- Publication date Jul 1, 2004
- Pei-Yang Yan
- C03 - GLASS MINERAL OR SLAG WOOL