Sean Chang

Person

Cupertino, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Tensile dielectric films using UV curing
- Patent number 9,659,769
- Issue date May 23, 2017
- Novellus Systems, Inc.
- Bhadri Varadarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Depositing tungsten into high aspect ratio features
- Patent number 9,034,768
- Issue date May 19, 2015
- Novellus Systems, Inc.
- Anand Chandrashekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for reducing stress in porous dielectric films
- Patent number 8,889,233
- Issue date Nov 18, 2014
- Novellus Systems, Inc.
- Maxim Kelman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Depositing tungsten into high aspect ratio features
- Patent number 8,835,317
- Issue date Sep 16, 2014
- Novellus Systems, Inc.
- Anand Chandrashekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Depositing tungsten into high aspect ratio features
- Patent number 8,435,894
- Issue date May 7, 2013
- Novellus Systems, Inc.
- Anand Chandrashekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for improving adhesion of low resistivity tungsten/tungsten...
- Patent number 8,207,062
- Issue date Jun 26, 2012
- Novellus Systems, Inc.
- Juwen Gao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Depositing tungsten into high aspect ratio features
- Patent number 8,124,531
- Issue date Feb 28, 2012
- Novellus Systems, Inc.
- Anand Chandrashekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Depositing tungsten into high aspect ratio features
- Patent number 8,119,527
- Issue date Feb 21, 2012
- Novellus Systems, Inc.
- Anand Chadrashekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DEPOSITING TUNGSTEN INTO HIGH ASPECT RATIO FEATURES
- Publication number 20130330926
- Publication date Dec 12, 2013
- Anand Chandrashekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITING TUNGSTEN INTO HIGH ASPECT RATIO FEATURES
- Publication number 20120115329
- Publication date May 10, 2012
- Anand Chandrashekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Depositing Tungsten Into High Aspect Ratio Features
- Publication number 20120009785
- Publication date Jan 12, 2012
- Anand Chandrashekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITING TUNGSTEN INTO HIGH ASPECT RATIO FEATURES
- Publication number 20110159690
- Publication date Jun 30, 2011
- Anand Chandrashekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR IMPROVING ADHESION OF LOW RESISTIVITY TUNGSTEN/TUNGSTEN...
- Publication number 20110059608
- Publication date Mar 10, 2011
- Novellus Systems, Inc.
- Juwen Gao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Tensile dielectric films using UV curing

Depositing tungsten into high aspect ratio features

Method for reducing stress in porous dielectric films

Depositing tungsten into high aspect ratio features

Depositing tungsten into high aspect ratio features

Method for improving adhesion of low resistivity tungsten/tungsten...

Depositing tungsten into high aspect ratio features

Depositing tungsten into high aspect ratio features

Patents Applicationslast 30 patents

DEPOSITING TUNGSTEN INTO HIGH ASPECT RATIO FEATURES

DEPOSITING TUNGSTEN INTO HIGH ASPECT RATIO FEATURES

Depositing Tungsten Into High Aspect Ratio Features

DEPOSITING TUNGSTEN INTO HIGH ASPECT RATIO FEATURES

METHOD FOR IMPROVING ADHESION OF LOW RESISTIVITY TUNGSTEN/TUNGSTEN...