Sean Chang

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Shenyang, CN

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Patents Grantslast 30 patents

Information Patent Grant
Load lock chamber and the cluster tool system using the same
- Patent number 10,497,591
- Issue date Dec 3, 2019
- PIOTECH CO., LTD.
- Ren Zhou
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTI-STATION PROCESSING CHAMBER FOR SEMICONDUCTOR
- Publication number 20230274957
- Publication date Aug 31, 2023
- PIOTECH CO., LTD.
- HUAQIANG TAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-STATION PROCESSING CHAMBER FOR SEMICONDUCTOR
- Publication number 20200203197
- Publication date Jun 25, 2020
- PIOTECH CO., LTD.
- HUAQIANG TAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD LOCK CHAMBER AND THE CLUSTER TOOL SYSTEM USING THE SAME
- Publication number 20170271187
- Publication date Sep 21, 2017
- PIOTECH CO., LTD.
- Ren ZHOU
- H01 - BASIC ELECTRIC ELEMENTS