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Sean Liu
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Hertfordshire, GB
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last 30 patents
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Patent Grant
Apparatus and method for enhanced critical dimension scatterometry
Patent number
7,502,101
Issue date
Mar 10, 2009
Nanometrics Incorporated
Chris Raymond
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Apparatus and method for enhanced critical dimension scatterometry
Publication number
20060289788
Publication date
Dec 28, 2006
Accent Optical Technologies, Inc.
Chris Raymond
G01 - MEASURING TESTING
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Patent Application
Apparatus and method for enhanced critical dimension scatterometry
Publication number
20060289789
Publication date
Dec 28, 2006
Accent Optical Technologies, Inc.
Chris Raymond
G01 - MEASURING TESTING