Sebastian Doern

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Oberkochen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Illumination optical unit for EUV microlithography
- Patent number 8,395,754
- Issue date Mar 12, 2013
- Carl Zeiss SMT GmbH
- Martin Endres
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION OPTICAL UNIT FOR EUV MICROLITHOGRAPHY
- Publication number 20110141445
- Publication date Jun 16, 2011
- Carl Zeiss SMT GMBH
- Martin Endres
- G02 - OPTICS