Sebastien Raoux

Person

San Francisco, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for improving operation of an electronic devi...
- Patent number 7,970,483
- Issue date Jun 28, 2011
- Applied Materials, Inc.
- Sebastien Raoux
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Apparatus for manufacturing a process abatement reactor
- Patent number 7,736,600
- Issue date Jun 15, 2010
- Applied Materials, Inc.
- Daniel O. Clark
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for sensing characteristics of the contents o...
- Patent number 7,700,049
- Issue date Apr 20, 2010
- Applied Materials, Inc.
- Daniel O. Clark
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for pressure control in electronic device man...
- Patent number 7,532,952
- Issue date May 12, 2009
- Applied Materials, Inc.
- Mark W. Curry
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Treatment of effluent from a substrate processing chamber
- Patent number 7,160,521
- Issue date Jan 9, 2007
- Applied Materials, Inc.
- Peter Porshnev
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Method and apparatus for monitoring and adjusting chamber impedance
- Patent number 7,004,107
- Issue date Feb 28, 2006
- Applied Materials Inc.
- Sébastien Raoux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ film thickness measurement using spectral interference at g...
- Patent number 6,888,639
- Issue date May 3, 2005
- Applied Materials, Inc.
- Andreas Goebel
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor device fabrication chamber cleaning method and appara...
- Patent number 6,863,019
- Issue date Mar 8, 2005
- Applied Materials, Inc.
- Shamouil Shamouilian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for cleaning an exhaust line in a semiconductor processin...
- Patent number 6,680,420
- Issue date Jan 20, 2004
- Applied Materials Inc.
- Ben Pang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for reducing perfluorocompound gases from subs...
- Patent number 6,517,913
- Issue date Feb 11, 2003
- Applied Materials, Inc.
- David Cheung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Implanatation process for improving ceramic resistance to corrosion
- Patent number 6,432,256
- Issue date Aug 13, 2002
- Applied Materials, Inc.
- Sébastien Raoux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for optical detection of effluent composition
- Patent number 6,366,346
- Issue date Apr 2, 2002
- Applied Materials, Inc.
- Thomas Nowak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mixed frequency CVD process
- Patent number 6,358,573
- Issue date Mar 19, 2002
- Applied Materials, Inc.
- Sebastien Raoux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heated electrostatic particle trap for in-situ vacuum line cleaning...
- Patent number 6,354,241
- Issue date Mar 12, 2002
- Applied Materials, Inc.
- Tsutomu Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Parallel plate apparatus for in-situ vacuum line cleaning for subst...
- Patent number 6,193,802
- Issue date Feb 27, 2001
- Applied Materials, Inc.
- Ben Pang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for cleaning a vacuum line in a CVD system
- Patent number 6,194,628
- Issue date Feb 27, 2001
- Applied Materials, Inc.
- Ben Pang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for reducing perfluorocompound gases from subs...
- Patent number 6,187,072
- Issue date Feb 13, 2001
- Applied Materials, Inc.
- David Cheung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Use of an asymmetric waveform to control ion bombardment during sub...
- Patent number 6,162,709
- Issue date Dec 19, 2000
- Applied Materials, Inc.
- Sebastien Raoux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing chamber with tunable impedance
- Patent number 6,136,388
- Issue date Oct 24, 2000
- Applied Materials, Inc.
- Sebastien Raoux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mixed frequency CVD apparatus
- Patent number 6,098,568
- Issue date Aug 8, 2000
- Applied Materials, Inc.
- Sebastien Raoux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave apparatus for in-situ vacuum line cleaning for substrate...
- Patent number 6,045,618
- Issue date Apr 4, 2000
- Applied Materials, Inc.
- Sebastien Raoux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Use of an asymmetric waveform to control ion bombardment during sub...
- Patent number 6,041,734
- Issue date Mar 28, 2000
- Applied Materials, Inc.
- Sebastien Raoux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ABATEMENT OF EFFLUENT GAS
- Publication number 20090175771
- Publication date Jul 9, 2009
- Applied Materials, Inc.
- Kenneth Chien-Quen Tsai
- G05 - CONTROLLING REGULATING
Information Patent Application
METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER
- Publication number 20080014134
- Publication date Jan 17, 2008
- APPLIED MATERIALS, INC.
- Sebastien Raoux
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER
- Publication number 20080003150
- Publication date Jan 3, 2008
- APPLIED MATERIALS, INC.
- Sebastien Raoux
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER
- Publication number 20080003158
- Publication date Jan 3, 2008
- APPLIED MATERIALS, INC.
- Sebastien Raoux
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER
- Publication number 20080003151
- Publication date Jan 3, 2008
- APPLIED MATERIALS, INC.
- Sebastien Raoux
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER
- Publication number 20080003157
- Publication date Jan 3, 2008
- APPLIED MATERIALS, INC.
- Sebastien Raoux
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHODS AND APPARATUS FOR IMPROVING OPERATION OF AN ELECTRONIC DEVI...
- Publication number 20070260343
- Publication date Nov 8, 2007
- Sebastien Raoux
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
METHODS AND APPARATUS FOR PRESSURE CONTROL IN ELECTRONIC DEVICE MAN...
- Publication number 20070260351
- Publication date Nov 8, 2007
- Mark W. Curry
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
METHOD AND APPARATUS FOR IMPROVED OPERATION OF AN ABATEMENT SYSTEM
- Publication number 20070256704
- Publication date Nov 8, 2007
- Peter Porshnev
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
METHODS AND APPARATUS FOR PREVENTING DEPOSITION OF REACTION PRODUCT...
- Publication number 20070190469
- Publication date Aug 16, 2007
- Daniel O. Clark
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR MANUFACTURING A PROCESS ABATEMENT REACTOR
- Publication number 20070172398
- Publication date Jul 26, 2007
- Daniel O. Clark
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR SELECTIVELY COUPLING PROCESS TOOLS TO ABA...
- Publication number 20070169889
- Publication date Jul 26, 2007
- Daniel O. Clark
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR SENSING CHARACTERISTICS OF THE CONTENTS O...
- Publication number 20070172399
- Publication date Jul 26, 2007
- Daniel O. Clark
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for process abatement
- Publication number 20070086931
- Publication date Apr 19, 2007
- Applied Materials, Inc.
- Sebastien Raoux
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Treatment of effluent from a substrate processing chamber
- Publication number 20040001787
- Publication date Jan 1, 2004
- APPLIED MATERIALS, INC.
- Peter Porshnev
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
In-situ film thickness measurement using spectral interference at g...
- Publication number 20030090676
- Publication date May 15, 2003
- Andreas Goebel
- G01 - MEASURING TESTING
Information Patent Application
Semiconductor device fabrication chamber cleaning method and appara...
- Publication number 20030036272
- Publication date Feb 20, 2003
- APPLIED MATERIALS, INC.
- Shamouil Shamouilian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for cleaning a vacuum line in a CVD system
- Publication number 20010016674
- Publication date Aug 23, 2001
- Applied Materials , Inc.
- Ben Pang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Sebastien Raoux

Person

Patents Grantslast 30 patents

Methods and apparatus for improving operation of an electronic devi...

Apparatus for manufacturing a process abatement reactor

Methods and apparatus for sensing characteristics of the contents o...

Methods and apparatus for pressure control in electronic device man...

Treatment of effluent from a substrate processing chamber

Method and apparatus for monitoring and adjusting chamber impedance

In-situ film thickness measurement using spectral interference at g...

Semiconductor device fabrication chamber cleaning method and appara...

Apparatus for cleaning an exhaust line in a semiconductor processin...

Method and apparatus for reducing perfluorocompound gases from subs...

Implanatation process for improving ceramic resistance to corrosion

Method and apparatus for optical detection of effluent composition

Mixed frequency CVD process

Heated electrostatic particle trap for in-situ vacuum line cleaning...

Parallel plate apparatus for in-situ vacuum line cleaning for subst...

Method and apparatus for cleaning a vacuum line in a CVD system

Method and apparatus for reducing perfluorocompound gases from subs...

Use of an asymmetric waveform to control ion bombardment during sub...

Substrate processing chamber with tunable impedance

Mixed frequency CVD apparatus

Microwave apparatus for in-situ vacuum line cleaning for substrate...

Use of an asymmetric waveform to control ion bombardment during sub...

Patents Applicationslast 30 patents

ABATEMENT OF EFFLUENT GAS

METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER

METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER

METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER

METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER

METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER

METHODS AND APPARATUS FOR IMPROVING OPERATION OF AN ELECTRONIC DEVI...

METHODS AND APPARATUS FOR PRESSURE CONTROL IN ELECTRONIC DEVICE MAN...

METHOD AND APPARATUS FOR IMPROVED OPERATION OF AN ABATEMENT SYSTEM

METHODS AND APPARATUS FOR PREVENTING DEPOSITION OF REACTION PRODUCT...

METHODS AND APPARATUS FOR MANUFACTURING A PROCESS ABATEMENT REACTOR

METHODS AND APPARATUS FOR SELECTIVELY COUPLING PROCESS TOOLS TO ABA...

METHODS AND APPARATUS FOR SENSING CHARACTERISTICS OF THE CONTENTS O...

Methods and apparatus for process abatement

Treatment of effluent from a substrate processing chamber

In-situ film thickness measurement using spectral interference at g...

Semiconductor device fabrication chamber cleaning method and appara...

Method and apparatus for cleaning a vacuum line in a CVD system