See-Eng Phan

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Remote plasma cleaning of chambers for electronics manufacturing sy...
- Patent number 11,854,773
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Yuanhong Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for removing oxides
- Patent number 8,846,163
- Issue date Sep 30, 2014
- Applied Materials, Inc.
- Chien-Teh Kao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for forming cobalt-containing materials
- Patent number 8,815,724
- Issue date Aug 26, 2014
- Applied Materials, Inc.
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for forming cobalt and cobalt silicide materials in tungste...
- Patent number 8,563,424
- Issue date Oct 22, 2013
- Applied Materials, Inc.
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for forming cobalt and cobalt silicide materials in tungste...
- Patent number 8,187,970
- Issue date May 29, 2012
- Applied Materials, Inc.
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for forming cobalt-containing materials
- Patent number 8,110,489
- Issue date Feb 7, 2012
- Applied Materials, Inc.
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for front end of line fabrication
- Patent number 7,767,024
- Issue date Aug 3, 2010
- Appplied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lid assembly for front end of line fabrication
- Patent number 7,520,957
- Issue date Apr 21, 2009
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flat style coil for improved precision etch uniformity
- Patent number 7,513,971
- Issue date Apr 7, 2009
- Applied Materials, Inc.
- Karl Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Epitaxial deposition process and apparatus
- Patent number 7,494,545
- Issue date Feb 24, 2009
- Applied Materials, Inc.
- Andrew Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for front end of line fabrication
- Patent number 7,396,480
- Issue date Jul 8, 2008
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal with integral shield
- Patent number 7,252,737
- Issue date Aug 7, 2007
- Applied Materials, Inc.
- Karl Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lower pedestal shield
- Patent number 6,837,968
- Issue date Jan 4, 2005
- Applied Materials, Inc.
- Karl Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pedestal with integral shield
- Patent number 6,726,805
- Issue date Apr 27, 2004
- Applied Materials, Inc.
- Karl Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pedestal with integral shield
- Patent number 6,652,713
- Issue date Nov 25, 2003
- Applied Materials, Inc.
- Karl Brown
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
REMOTE PLASMA CLEANING OF CHAMBERS FOR ELECTRONICS MANUFACTURING SY...
- Publication number 20240062999
- Publication date Feb 22, 2024
- Applied Materials, Inc.
- Yuanhong Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOTE PLASMA CLEANING OF CHAMBERS FOR ELECTRONICS MANUFACTURING SY...
- Publication number 20210305028
- Publication date Sep 30, 2021
- Applied Materials, Inc.
- Yuanhong Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE COBALT DEPOSITION ON COPPER SURFACES
- Publication number 20150325446
- Publication date Nov 12, 2015
- Applied Materials, Inc.
- Sang-Ho YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHAMBER PROCESSING SYSTEM
- Publication number 20140076234
- Publication date Mar 20, 2014
- Applied Materials, Inc.
- Chien-Teh KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR FORMING COBALT-CONTAINING MATERIALS
- Publication number 20120264291
- Publication date Oct 18, 2012
- Applied Materials, Inc.
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR REMOVING OXIDES
- Publication number 20120244704
- Publication date Sep 27, 2012
- CHIEN-TEH KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR FORMING COBALT AND COBALT SILICIDE MATERIALS IN TUNGSTE...
- Publication number 20120214303
- Publication date Aug 23, 2012
- SESHADRI GANGULI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method Of Processing Low K Dielectric Films
- Publication number 20120122320
- Publication date May 17, 2012
- Applied Materials, Inc.
- Annamalai Lakshmanan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR REMOVING OXIDES
- Publication number 20110223755
- Publication date Sep 15, 2011
- CHIEN-TEH KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR FORMING COBALT-CONTAINING MATERIALS
- Publication number 20110124192
- Publication date May 26, 2011
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR FORMING COBALT AND COBALT SILICIDE MATERIALS IN TUNGSTE...
- Publication number 20110086509
- Publication date Apr 14, 2011
- SESHADRI GANGULI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE COBALT DEPOSITION ON COPPER SURFACES
- Publication number 20090269507
- Publication date Oct 29, 2009
- Sang-Ho Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR REMOVING OXIDES
- Publication number 20090111280
- Publication date Apr 30, 2009
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR FORMING COBALT AND COBALT SILICIDE MATERIALS IN TUNGSTE...
- Publication number 20090004850
- Publication date Jan 1, 2009
- SESHADRI GANGULI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR FORMING COBALT AND COBALT SILICIDE MATERIALS IN COPPER...
- Publication number 20080268635
- Publication date Oct 30, 2008
- Sang-Ho Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FRONT END OF LINE FABRICATION
- Publication number 20080268645
- Publication date Oct 30, 2008
- CHIEN-TEH KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR FORMING COBALT-CONTAINING MATERIALS
- Publication number 20070202254
- Publication date Aug 30, 2007
- SESHADRI GANGULI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Epitaxial deposition process and apparatus
- Publication number 20070181057
- Publication date Aug 9, 2007
- APPLIED MATERIALS, INC.
- Andrew Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Monitoring a flow distribution of an energized gas
- Publication number 20060093730
- Publication date May 4, 2006
- APPLIED MATERIALS, INC.
- See-Eng Phan
- B08 - CLEANING
Information Patent Application
In-situ chamber clean process to remove by-product deposits from ch...
- Publication number 20060051966
- Publication date Mar 9, 2006
- APPLIED MATERIALS, INC.
- David T. Or
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
In-situ dry clean chamber for front end of line fabrication
- Publication number 20050230350
- Publication date Oct 20, 2005
- APPLIED MATERIALS, INC.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Lid assembly for front end of line fabrication
- Publication number 20050218507
- Publication date Oct 6, 2005
- APPLIED MATERIALS, INC.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate support for in-situ dry clean chamber for front end of li...
- Publication number 20050221552
- Publication date Oct 6, 2005
- APPLIED MATERIALS, INC.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for front end of line fabrication
- Publication number 20050205110
- Publication date Sep 22, 2005
- APPLIED MATERIALS, INC.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Pedestal with integral shield
- Publication number 20050056370
- Publication date Mar 17, 2005
- APPLIED MATERIALS, INC.
- Karl Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Lower pedestal shield
- Publication number 20040083977
- Publication date May 6, 2004
- APPLIED MATERIALS, INC.
- Karl Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Flat style coil for improved precision etch uniformity
- Publication number 20040018740
- Publication date Jan 29, 2004
- APPLIED MATERIALS, INC.
- Karl Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pedestal with integral shield
- Publication number 20030029564
- Publication date Feb 13, 2003
- Karl Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pedestal with integral shield
- Publication number 20030029568
- Publication date Feb 13, 2003
- APPLIED MATERIALS, INC.
- Karl Brown
- H01 - BASIC ELECTRIC ELEMENTS

See-Eng Phan

Person

Patents Grantslast 30 patents

Remote plasma cleaning of chambers for electronics manufacturing sy...

Method for removing oxides

Process for forming cobalt-containing materials

Process for forming cobalt and cobalt silicide materials in tungste...

Process for forming cobalt and cobalt silicide materials in tungste...

Process for forming cobalt-containing materials

Method for front end of line fabrication

Lid assembly for front end of line fabrication

Flat style coil for improved precision etch uniformity

Epitaxial deposition process and apparatus

Method for front end of line fabrication

Pedestal with integral shield

Lower pedestal shield

Pedestal with integral shield

Pedestal with integral shield

Patents Applicationslast 30 patents

REMOTE PLASMA CLEANING OF CHAMBERS FOR ELECTRONICS MANUFACTURING SY...

REMOTE PLASMA CLEANING OF CHAMBERS FOR ELECTRONICS MANUFACTURING SY...

SELECTIVE COBALT DEPOSITION ON COPPER SURFACES

MULTI CHAMBER PROCESSING SYSTEM

PROCESS FOR FORMING COBALT-CONTAINING MATERIALS

METHOD FOR REMOVING OXIDES

PROCESS FOR FORMING COBALT AND COBALT SILICIDE MATERIALS IN TUNGSTE...

Method Of Processing Low K Dielectric Films

METHOD FOR REMOVING OXIDES

PROCESS FOR FORMING COBALT-CONTAINING MATERIALS

PROCESS FOR FORMING COBALT AND COBALT SILICIDE MATERIALS IN TUNGSTE...

SELECTIVE COBALT DEPOSITION ON COPPER SURFACES

METHOD FOR REMOVING OXIDES

PROCESS FOR FORMING COBALT AND COBALT SILICIDE MATERIALS IN TUNGSTE...

PROCESS FOR FORMING COBALT AND COBALT SILICIDE MATERIALS IN COPPER...

METHOD FOR FRONT END OF LINE FABRICATION

PROCESS FOR FORMING COBALT-CONTAINING MATERIALS

Epitaxial deposition process and apparatus

Monitoring a flow distribution of an energized gas

In-situ chamber clean process to remove by-product deposits from ch...

In-situ dry clean chamber for front end of line fabrication

Lid assembly for front end of line fabrication

Substrate support for in-situ dry clean chamber for front end of li...

Method for front end of line fabrication

Pedestal with integral shield

Lower pedestal shield

Flat style coil for improved precision etch uniformity

Pedestal with integral shield

Pedestal with integral shield