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Patents Grants
last 30 patents
Information
Patent Grant
Method of forming plasma processing apparatus, related apparatus, a...
Patent number
11,715,628
Issue date
Aug 1, 2023
Samsung Electronics Co., Ltd.
Jeongil Mun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sensor device and etching apparatus having the same
Patent number
11,264,291
Issue date
Mar 1, 2022
Samsung Electronics Co., Ltd.
Seeyub Yang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF FORMING PLASMA PROCESSING APPARATUS, RELATED APPARATUS, A...
Publication number
20220044912
Publication date
Feb 10, 2022
Samsung Electronics Co., Ltd.
Jeongil MUN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SENSOR DEVICE AND ETCHING APPARATUS HAVING THE SAME
Publication number
20200411390
Publication date
Dec 31, 2020
Samsung Electronics Co., Ltd.
SEEYUB YANG
H01 - BASIC ELECTRIC ELEMENTS