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last 30 patents
Information
Patent Grant
Chemical liquid preparation device, and substrate processing device
Patent number
12,064,739
Issue date
Aug 20, 2024
SCREEN Holdings Co., Ltd.
Hajime Nishide
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
12,042,813
Issue date
Jul 23, 2024
SCREEN Holdings Co., Ltd.
Hiroshi Abe
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Substrate processing method and substrate processing device
Patent number
11,670,517
Issue date
Jun 6, 2023
SCREEN Holdings Co., Ltd.
Sei Negoro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silicon etching solution and method for producing silicon device us...
Patent number
11,466,206
Issue date
Oct 11, 2022
Tokuyama Corporation
Yoshiki Seike
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical liquid preparation method, chemical liquid preparation dev...
Patent number
11,439,967
Issue date
Sep 13, 2022
SCREEN Holdings Co., Ltd.
Hajime Nishide
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,222,795
Issue date
Jan 11, 2022
SCREEN Holdings Co., Ltd.
Sei Negoro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
10,861,718
Issue date
Dec 8, 2020
SCREEN Holdings Co., Ltd.
Sei Negoro
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
10,814,251
Issue date
Oct 27, 2020
SCREEN Holdings Co., Ltd.
Sei Negoro
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
10,464,107
Issue date
Nov 5, 2019
SCREEN Holdings Co., Ltd.
Keiji Iwata
B08 - CLEANING
Information
Patent Grant
Substrate treatment apparatus
Patent number
10,032,654
Issue date
Jul 24, 2018
SCREEN Holdings Co., Ltd.
Sei Negoro
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate treatment method and substrate treatment apparatus
Patent number
9,555,452
Issue date
Jan 31, 2017
SCREEN Holdings Co., Ltd.
Sei Negoro
B08 - CLEANING
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
9,403,187
Issue date
Aug 2, 2016
SCREEN Holdings Co., Ltd.
Sei Negoro
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
9,340,761
Issue date
May 17, 2016
SCREEN Holdings Co., Ltd.
Sei Negoro
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Substrate treatment apparatus and substrate treatment method
Patent number
8,877,076
Issue date
Nov 4, 2014
SCREEN Holdings Co., Ltd.
Sei Negoro
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CHEMICAL LIQUID PREPARATION DEVICE, AND SUBSTRATE PROCESSING DEVICE
Publication number
20240342672
Publication date
Oct 17, 2024
SCREEN Holdings Co., Ltd.
Hajime NISHIDE
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240261814
Publication date
Aug 8, 2024
SCREEN Holdings Co., Ltd.
Hiroshi ABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230323205
Publication date
Oct 12, 2023
SCREEN Holdings Co., Ltd.
Sei NEGORO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
Publication number
20230298895
Publication date
Sep 21, 2023
SCREEN Holdings Co., Ltd.
Sei NEGORO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING CONDITION SETTING METHOD, SUBSTRATE PROCESSING...
Publication number
20230268208
Publication date
Aug 24, 2023
SCREEN Holdings Co., Ltd.
Sei NEGORO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Silicon Etching Solution and Method for Producing Silicon Device Us...
Publication number
20220403242
Publication date
Dec 22, 2022
Tokuyama Corporation
Yoshiki SEIKE
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
CHEMICAL LIQUID PREPARATION DEVICE, AND SUBSTRATE PROCESSING DEVICE
Publication number
20220347641
Publication date
Nov 3, 2022
SCREEN Holdings Co., Ltd.
Hajime NISHIDE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING APPARATUS
Publication number
20220277966
Publication date
Sep 1, 2022
SCREEN Holdings Co., Ltd.
Jun SAWASHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20220208563
Publication date
Jun 30, 2022
SCREEN Holdings Co., Ltd.
Sei NEGORO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
Publication number
20210313191
Publication date
Oct 7, 2021
SCREEN Holdings Co., Ltd.
Sei NEGORO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Silicon Etching Solution, Method for Manufacturing Silicon Device U...
Publication number
20210269716
Publication date
Sep 2, 2021
Tokuyama Corporation
Yoshiki Seike
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20210197224
Publication date
Jul 1, 2021
SCREEN Holdings Co., Ltd.
Hiroshi ABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE
Publication number
20210057235
Publication date
Feb 25, 2021
SCREEN Holdings Co., Ltd.
Sei NEGORO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20210043468
Publication date
Feb 11, 2021
SCREEN Holdings Co., Ltd.
Sei NEGORO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Silicon Etching Solution and Method for Producing Silicon Device Us...
Publication number
20200248076
Publication date
Aug 6, 2020
Tokuyama Corporation
Yoshiki SEIKE
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20190240597
Publication date
Aug 8, 2019
SCREEN Holdings Co., Ltd.
Sei NEGORO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20190221450
Publication date
Jul 18, 2019
SCREEN Holdings Co., Ltd.
Sei NEGORO
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
CHEMICAL LIQUID PREPARATION METHOD, CHEMICAL LIQUID PREPARATION DEV...
Publication number
20190091640
Publication date
Mar 28, 2019
SCREEN Holdings Co., Ltd.
Hajime NISHIDE
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20160236241
Publication date
Aug 18, 2016
SCREEN Holdings Co., Ltd.
Sei NEGORO
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20150114432
Publication date
Apr 30, 2015
SCREEN Holdings Co., Ltd.
Keiji IWATA
B08 - CLEANING
Information
Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
Publication number
20150072078
Publication date
Mar 12, 2015
Dainippon Screen Mfg. Co., Ltd.
Sei NEGORO
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
Publication number
20150068557
Publication date
Mar 12, 2015
Dainippon Screen Mfg. Co., Ltd.
Sei NEGORO
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20150060406
Publication date
Mar 5, 2015
Dainippon Screen Mfg. Co., Ltd.
Sei NEGORO
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20150060407
Publication date
Mar 5, 2015
Dainippon Screen Mfg. Co., Ltd.
Sei NEGORO
B08 - CLEANING
Information
Patent Application
SUBSTRATE TREATMENT APPARATUS
Publication number
20150013732
Publication date
Jan 15, 2015
Dainippon Screen Mfg. Co., Ltd.
Sei NEGORO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
Publication number
20130224956
Publication date
Aug 29, 2013
Dainippon Screen Mfg. Co., Ltd.
Sei NEGORO
H01 - BASIC ELECTRIC ELEMENTS