Seigo Fujitsu

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 11,594,430
- Issue date Feb 28, 2023
- Tokyo Electron Limited
- Takafumi Tsuchiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,424,141
- Issue date Aug 23, 2022
- Tokyo Electron Limited
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20190122906
- Publication date Apr 25, 2019
- TOKYO ELECTRON LIMITED
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20190080937
- Publication date Mar 14, 2019
- TOKYO ELECTRON LIMITED
- Takafumi Tsuchiya
- H01 - BASIC ELECTRIC ELEMENTS