Seiichi Kaise

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, purge gas control method, and vacuu...
- Patent number 12,285,786
- Issue date Apr 29, 2025
- Tokyo Electron Limited
- Norihiko Amikura
- B08 - CLEANING
Information Patent Grant
Container, container partition plate, substrate processing system,...
- Patent number 11,735,448
- Issue date Aug 22, 2023
- Tokyo Electron Limited
- Toshiaki Toyomaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier and jig
- Patent number 11,631,607
- Issue date Apr 18, 2023
- Tokyo Electron Limited
- Toshiaki Toyomaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Purging apparatus and purging method for substrate storage container
- Patent number 10,010,913
- Issue date Jul 3, 2018
- Tokyo Electron Limited
- Seiichi Kaise
- B08 - CLEANING
Information Patent Grant
Method for purging a substrate container
- Patent number 9,305,817
- Issue date Apr 5, 2016
- Tokyo Electron Limited
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, control method adopted in substrate...
- Patent number 8,859,046
- Issue date Oct 14, 2014
- Tokyo Electron Limited
- Hiroshi Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, system and program
- Patent number 8,475,623
- Issue date Jul 2, 2013
- Tokyo Electron Limited
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, system and program
- Patent number 8,257,601
- Issue date Sep 4, 2012
- Tokyo Electron Limited
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 7,854,821
- Issue date Dec 21, 2010
- Tokyo Electron Limited
- Hiroshi Nakamura
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Cluster tool and transfer control method
- Patent number 7,245,987
- Issue date Jul 17, 2007
- Tokyo Electron Limited
- Kiyohito Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster tool and method for controlling transport
- Patent number 6,970,770
- Issue date Nov 29, 2005
- Tokyo Electron Limited
- Kiyohito Iljima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TRANSFER MODULE AND TRANSFER METHOD
- Publication number 20240186158
- Publication date Jun 6, 2024
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER MODULE AND TRANSFER METHOD
- Publication number 20240182252
- Publication date Jun 6, 2024
- TOKYO ELECTRON LIMITED
- Toshiaki TOYOMAKI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE TRANSFER SYSTEM AND TRANSFER MODULE
- Publication number 20240030011
- Publication date Jan 25, 2024
- TOKYO ELECTRON LIMITED
- Toshiaki TOYOMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAINER, CONTAINER PARTITION PLATE, SUBSTRATE PROCESSING SYSTEM,...
- Publication number 20230290660
- Publication date Sep 14, 2023
- TOKYO ELECTRON LIMITED
- Toshiaki TOYOMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PURGE GAS CONTROL METHOD, AND VACUU...
- Publication number 20220080476
- Publication date Mar 17, 2022
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- B08 - CLEANING
Information Patent Application
CONTAINER, CONTAINER PARTITION PLATE, SUBSTRATE PROCESSING SYSTEM,...
- Publication number 20200286752
- Publication date Sep 10, 2020
- TOKYO ELECTRON LIMITED
- Toshiaki TOYOMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARRIER AND JIG
- Publication number 20200251372
- Publication date Aug 6, 2020
- TOKYO ELECTRON LIMITED
- Toshiaki TOYOMAKI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM OF PROCESSING SUBSTRATE, TRANSFER METHOD, TRANSFER PROGRAM,...
- Publication number 20200194296
- Publication date Jun 18, 2020
- TOKYO ELECTRON LIMITED
- Masahiro NUMAKURA
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
PURGING APPARATUS AND PURGING METHOD FOR SUBSTRATE STORAGE CONTAINER
- Publication number 20150040950
- Publication date Feb 12, 2015
- TOKYO ELECTRON LIMITED
- Seiichi Kaise
- B08 - CLEANING
Information Patent Application
METHOD FOR PURGING A SUBSTRATE CONTAINER
- Publication number 20130213442
- Publication date Aug 22, 2013
- TOKYO ELECTRON LIMITED
- Seiichi KAISE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM
- Publication number 20120292290
- Publication date Nov 22, 2012
- TOKYO ELECTRON LIMITED
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD ADOPTED IN SUBSTRATE...
- Publication number 20120046774
- Publication date Feb 23, 2012
- TOKYO ELECTRON LIMITED
- Hiroshi Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM
- Publication number 20110171830
- Publication date Jul 14, 2011
- TOKYO ELECTRON LIMITED
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus
- Publication number 20070009649
- Publication date Jan 11, 2007
- Hiroshi Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus, control method adopted in substrate...
- Publication number 20060176928
- Publication date Aug 10, 2006
- TOKYO ELECTRON LIMITED
- Hiroshi Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method, system and program
- Publication number 20060090703
- Publication date May 4, 2006
- TOKYO ELECTRON LIMITED
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cluster tool and transfer control method
- Publication number 20050220577
- Publication date Oct 6, 2005
- TOKYO ELECTRON LIMITED
- Kiyohito Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cluster tool and method for controlling transport
- Publication number 20040117059
- Publication date Jun 17, 2004
- Kiyohito IIjima
- H01 - BASIC ELECTRIC ELEMENTS

Seiichi Kaise

Person

Patents Grantslast 30 patents

Substrate processing apparatus, purge gas control method, and vacuu...

Container, container partition plate, substrate processing system,...

Carrier and jig

Purging apparatus and purging method for substrate storage container

Method for purging a substrate container

Substrate processing apparatus, control method adopted in substrate...

Substrate processing method, system and program

Substrate processing method, system and program

Substrate processing apparatus

Cluster tool and transfer control method

Cluster tool and method for controlling transport

Patents Applicationslast 30 patents

TRANSFER MODULE AND TRANSFER METHOD

TRANSFER MODULE AND TRANSFER METHOD

SUBSTRATE TRANSFER SYSTEM AND TRANSFER MODULE

CONTAINER, CONTAINER PARTITION PLATE, SUBSTRATE PROCESSING SYSTEM,...

SUBSTRATE PROCESSING APPARATUS, PURGE GAS CONTROL METHOD, AND VACUU...

CONTAINER, CONTAINER PARTITION PLATE, SUBSTRATE PROCESSING SYSTEM,...

CARRIER AND JIG

SYSTEM OF PROCESSING SUBSTRATE, TRANSFER METHOD, TRANSFER PROGRAM,...

PURGING APPARATUS AND PURGING METHOD FOR SUBSTRATE STORAGE CONTAINER

METHOD FOR PURGING A SUBSTRATE CONTAINER

SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM

SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD ADOPTED IN SUBSTRATE...

SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM

Substrate processing apparatus

Substrate processing apparatus, control method adopted in substrate...

Substrate processing method, system and program

Cluster tool and transfer control method

Cluster tool and method for controlling transport