Seiichi Maeda

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Ayase, JP

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Patents Grantslast 30 patents

Information Patent Grant
Specular machining apparatus for peripheral edge portion of wafer
- Patent number 5,097,630
- Issue date Mar 24, 1992
- Speedfam Co., Ltd.
- Seiichi Maeda
- B24 - GRINDING POLISHING
Information Patent Grant
Edge polisher
- Patent number 5,094,037
- Issue date Mar 10, 1992
- Speedfam Company, Ltd.
- Shunji Hakomori
- B24 - GRINDING POLISHING
Information Patent Grant
Flat lapping machine
- Patent number 4,805,348
- Issue date Feb 21, 1989
- Speedfam Co., Ltd.
- Hatsuyuki Arai
- B24 - GRINDING POLISHING