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Seiichi NAKAZAWA
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Yokohama, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Chamber of charged particle beam drawing apparatus
Patent number
D759603
Issue date
Jun 21, 2016
NuFlare Technology, Inc.
Hiroyasu Saito
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Charged particle beam drawing apparatus and drawing chamber
Patent number
9,196,458
Issue date
Nov 24, 2015
NuFlare Technology, Inc.
Hiroyasu Saito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam drawing apparatus and drawing chamber
Patent number
9,165,747
Issue date
Oct 20, 2015
NuFlare Technology, Inc.
Hiroyasu Saito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chamber of charged particle beam drawing apparatus
Patent number
D722298
Issue date
Feb 10, 2015
NuFlare Technology, Inc.
Hiroyasu Saito
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Nozzle for vapor-phase epitaxial equipment
Patent number
D576647
Issue date
Sep 9, 2008
Nuflare Technology, Inc.
Hiroshi Furutani
D15 - Machines not elsewhere specified
Patents Applications
last 30 patents
Information
Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND DRAWING CHAMBER
Publication number
20150021495
Publication date
Jan 22, 2015
NuFlare Technology, Inc.
Hiroyasu SAITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Film-forming method and film-forming equipment
Publication number
20070123007
Publication date
May 31, 2007
NuFLARE TECHNOLOGY, INC.
Hiroshi Furutani
C30 - CRYSTAL GROWTH
Information
Patent Application
Vapor phase deposition apparatus and vapor phase deposition method
Publication number
20070023869
Publication date
Feb 1, 2007
NuFLARE TECHNOLOGY, INC.
Hiroshi Furutani
C30 - CRYSTAL GROWTH