Membership
Tour
Register
Log in
Seiichi Shiraki
Follow
Person
Tokyo, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Optical aligner equipped with luminance sensor on movable stage
Patent number
5,532,497
Issue date
Jul 2, 1996
NEC Corporation
Tadao Yasuzato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing semiconductor device using measurement mark...
Patent number
5,498,877
Issue date
Mar 12, 1996
NEC Corporation
Seiichi Shiraki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY