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Seiichi Takayama
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Nirasaki-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Apparatus for manufacturing a semiconductor device
Patent number
8,075,730
Issue date
Dec 13, 2011
Tokyo Electron Limited
Satoru Shimura
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
APPARATUS FOR MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20120034779
Publication date
Feb 9, 2012
Satoru SHIMURA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Process For Fabricating Semiconductor Device
Publication number
20080057728
Publication date
Mar 6, 2008
TOKYO ELECTRON LIMITED
Satoru Shimura
H01 - BASIC ELECTRIC ELEMENTS