TREA

Seiichi TAKAYAMA

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  • Shanghai, CN
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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 8,349,085
    • Issue date Jan 8, 2013
    • Tokyo Electron Limited
    • Shigeru Tahara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20080179006
    • Publication date Jul 31, 2008
    • TOKYO ELECTRON LIMITED
    • Shigeru TAHARA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...