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Charged Particle Beam Device
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Publication number 20240194439
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Publication date Jun 13, 2024
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HITACHI HIGH-TECH CORPORATION
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Akito TANOKUCHI
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H01 - BASIC ELECTRIC ELEMENTS
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Charged Particle Beam Device
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Publication number 20230005700
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Publication date Jan 5, 2023
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Hitachi High-Tech Corporation
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Takafumi MIWA
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H01 - BASIC ELECTRIC ELEMENTS
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Charged Particle Beam Device
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Publication number 20220246387
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Publication date Aug 4, 2022
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HITACHI HIGH-TECH CORPORATION
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Akito TANOKUCHI
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H01 - BASIC ELECTRIC ELEMENTS
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CHARGED PARTICLE BEAM APPARATUS
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Publication number 20220028650
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Publication date Jan 27, 2022
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Hitachi High-Tech Corporation
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Takafumi Miwa
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H01 - BASIC ELECTRIC ELEMENTS
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Charged Particle Beam Device
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Publication number 20210134555
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Publication date May 6, 2021
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Hitachi High-Technologies Corporation
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Akito TANOKUCHI
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H01 - BASIC ELECTRIC ELEMENTS
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Charged-Particle Beam Device
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Publication number 20200395188
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Publication date Dec 17, 2020
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HITACHI HIGH-TECH CORPORATION
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Seiichiro KANNO
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H01 - BASIC ELECTRIC ELEMENTS
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CHARGED PARTICLE BEAM DEVICE
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Publication number 20200006032
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Publication date Jan 2, 2020
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Hitachi High-Technologies Corporation
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Takafumi MIWA
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H01 - BASIC ELECTRIC ELEMENTS
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Charged-Particle Beam Device
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Publication number 20190355541
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Publication date Nov 21, 2019
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Hitachi High-Technologies Corporation
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Seiichiro KANNO
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H01 - BASIC ELECTRIC ELEMENTS
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Charged Particle Beam Apparatus
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Publication number 20160013010
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Publication date Jan 14, 2016
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Hitachi High-Technologies Corporation
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Seiichiro KANNO
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H01 - BASIC ELECTRIC ELEMENTS
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Charged Particle Radiation Apparatus
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Publication number 20150371814
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Publication date Dec 24, 2015
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Hitachi High-Technologies Corporation
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Seiichiro KANNO
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H01 - BASIC ELECTRIC ELEMENTS
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Charged-Particle Beam Device
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Publication number 20150357156
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Publication date Dec 10, 2015
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Hitachi High-Technologies Corporation
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Yasushi EBIZUKA
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H01 - BASIC ELECTRIC ELEMENTS
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CHARGED PARTICLE BEAM APPARATUS
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Publication number 20150097123
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Publication date Apr 9, 2015
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Hitachi High-Technologies Corporation
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Yasushi Ebizuka
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H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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SAMPLE OBSERVATION APPARATUS
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Publication number 20130167665
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Publication date Jul 4, 2013
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Hitachi High-Technologies Corporation
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Tetsuya NIIBORI
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G01 - MEASURING TESTING
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SEMICONDUCTOR INSPECTING APPARATUS
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Publication number 20120261589
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Publication date Oct 18, 2012
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Hitachi High-Technologies Corporation
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Go Miya
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H01 - BASIC ELECTRIC ELEMENTS
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Scanning Electron Microscope
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Publication number 20120256087
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Publication date Oct 11, 2012
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Hitachi High-Technologies Corporation
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Seiichiro Kanno
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H01 - BASIC ELECTRIC ELEMENTS
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-
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PLASMA PROCESSING APPARATUS
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Publication number 20110139370
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Publication date Jun 16, 2011
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Hitachi High-Technologies Corporation
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Naoshi Itabashi
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H01 - BASIC ELECTRIC ELEMENTS
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SEMICONDUCTOR INSPECTING APPARATUS
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Publication number 20110095185
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Publication date Apr 28, 2011
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Hitachi High-Technologies Corporation
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Go Miya
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H01 - BASIC ELECTRIC ELEMENTS
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PLASMA PROCESSING APPARATUS
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Publication number 20100282414
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Publication date Nov 11, 2010
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Hitachi High-Technologies Corp
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Naoshi ITABASHI
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing apparatus
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Publication number 20080023147
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Publication date Jan 31, 2008
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Kenetsu Yokogawa
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H01 - BASIC ELECTRIC ELEMENTS
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