Seiichirou Miyata

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Static electricity chuck and wafer stage
- Patent number 5,981,913
- Issue date Nov 9, 1999
- Sony Corporation
- Shingo Kadomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer stage for manufacturing a semiconductor device
- Patent number 5,968,273
- Issue date Oct 19, 1999
- Sony Corporation
- Shingo Kadomura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...