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Seiji Fujino
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Toyota, JP
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last 30 patents
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Patent Grant
Method for manufacturing semiconductor dynamic quantity sensor
Patent number
6,287,885
Issue date
Sep 11, 2001
Denso Corporation
Hiroshi Muto
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Semiconductor dynamical quantity sensor device having electrodes in...
Patent number
6,151,966
Issue date
Nov 28, 2000
Denso Corporation
Minekazu Sakai
G01 - MEASURING TESTING