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Seiji Iseda
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Katonah, NY, US
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Patents Grants
last 30 patents
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Patent Grant
Method and apparatus for etching a structure in a plasma chamber
Patent number
7,799,237
Issue date
Sep 21, 2010
Sony Corporation
Seiji Iseda
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD AND APPARATUS FOR ETCHING A STRUCTURE IN A PLASMA CHAMBER
Publication number
20100320170
Publication date
Dec 23, 2010
SONY CORPORATION
Seiji Iseda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for etching a structure in a plasma chamber
Publication number
20070272358
Publication date
Nov 29, 2007
Seiji Iseda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POLYSILICON ETCHING METHODS
Publication number
20070056930
Publication date
Mar 15, 2007
International Business Machines Corporation
Seiji Iseda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Removal spacer formation with carbon film
Publication number
20060166423
Publication date
Jul 27, 2006
Seiji Iseda
H01 - BASIC ELECTRIC ELEMENTS