Seiji Kawaguchi

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods for protecting silicon or silicon carbide electrode surface...
- Patent number 7,226,869
- Issue date Jun 5, 2007
- Lam Research Corporation
- Kenji Takeshita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Etch with uniformity control
- Patent number 7,090,782
- Issue date Aug 15, 2006
- Lam Research Corporation
- Seiji Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HARDMASK OPEN AND ETCH PROFILE CONTROL WITH HARDMASK OPEN
- Publication number 20100327413
- Publication date Dec 30, 2010
- LAM RESEARCH CORPORATION
- Jong Pil Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for protecting silicon or silicon carbide electrode surface...
- Publication number 20060091104
- Publication date May 4, 2006
- Kenji Takeshita
- B08 - CLEANING