Seiji Kozawa

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Patents Grantslast 30 patents

Information Patent Grant
Abnormality determination system and abnormality determination meth...
- Patent number 8,812,266
- Issue date Aug 19, 2014
- Tokyo Electron Limited
- Naoto Nakamura
- G05 - CONTROLLING REGULATING
Information Patent Grant
Coating and developing apparatus and pattern forming method
- Patent number 6,814,809
- Issue date Nov 9, 2004
- Tokyo Electron Limited
- Michiaki Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of determining retreat permission position of carrier arm an...
- Patent number 6,643,564
- Issue date Nov 4, 2003
- Tokyo Electron Limited
- Yukinori Kataoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer device centering method and substrate processing apparatus
- Patent number 6,332,751
- Issue date Dec 25, 2001
- Tokyo Electron Limited
- Seiji Kozawa
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Carrier apparatus with more than one carrier belts and processing a...
- Patent number 6,050,389
- Issue date Apr 18, 2000
- Tokyo Electron Limited
- Naruaki Iida
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ABNORMALITY DETERMINATION SYSTEM AND ABNORMALITY DETERMINATION METH...
- Publication number 20130304419
- Publication date Nov 14, 2013
- TOKYO ELECTRON LIMITED
- Naoto Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating and developing apparatus and pattern forming method
- Publication number 20050042555
- Publication date Feb 24, 2005
- TOKYO ELECTRON LIMITED
- Michiaki Matsushita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of determining retreat permission position of carrier arm an...
- Publication number 20030139852
- Publication date Jul 24, 2003
- TOKYO ELECTRON LIMITED
- Yukinori Kataoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating and developing apparatus and pattern forming method
- Publication number 20020076658
- Publication date Jun 20, 2002
- TOKYO ELECTRON LIMITED
- Michiaki Matsushita
- H01 - BASIC ELECTRIC ELEMENTS