Seiji Matsuyama

Person

Amagasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method
- Patent number 8,183,165
- Issue date May 22, 2012
- Tokyo Electron Limited
- Seiji Matsuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of modifying insulating film
- Patent number 8,021,987
- Issue date Sep 20, 2011
- Tokyo Electron Limited
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method and computer storage medium
- Patent number 7,897,518
- Issue date Mar 1, 2011
- Tokyo Electron Limited
- Seiji Matsuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treating method and production method for semiconductor d...
- Patent number 7,759,598
- Issue date Jul 20, 2010
- Tokyo Electron Limited
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method and computer storage medium
- Patent number 7,723,241
- Issue date May 25, 2010
- Tokyo Electron Limited
- Seiji Matsuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming insulation film
- Patent number 7,662,236
- Issue date Feb 16, 2010
- Tokyo Electron Limited
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of modifying insulating film
- Patent number 7,655,574
- Issue date Feb 2, 2010
- Tokyo Electron Limited
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming underlying insulation film
- Patent number 7,622,402
- Issue date Nov 24, 2009
- Tokyo Electron Limited
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating method
- Patent number 7,517,751
- Issue date Apr 14, 2009
- Tokyo Electron Limited
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming insulation film
- Patent number 7,446,052
- Issue date Nov 4, 2008
- Tokyo Electron Limited
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nitriding method of gate oxide film
- Patent number 7,429,539
- Issue date Sep 30, 2008
- Tokyo Electron Limited
- Seiji Matsuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and material for electronic device
- Patent number 7,250,375
- Issue date Jul 31, 2007
- Tokyo Electron Limited
- Toshio Nakanishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 7,232,772
- Issue date Jun 19, 2007
- Tokyo Electron Limited
- Seiji Matsuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating method and production method for semiconductor d...
- Patent number 7,226,848
- Issue date Jun 5, 2007
- Tokyo Electron Limited
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 7,226,874
- Issue date Jun 5, 2007
- Tokyo Electron Limited
- Seiji Matsuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for producing materials for electronic device
- Patent number 7,217,659
- Issue date May 15, 2007
- Tokyo Electron Limited
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of producing electronic device material
- Patent number 6,897,149
- Issue date May 24, 2005
- Tokyo Electron Limited
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING METHOD AND COMPUTER STORAGE MEDIUM
- Publication number 20110124202
- Publication date May 26, 2011
- TOKYO ELECTRON LIMITED
- Seiji Matsuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING METHOD AND COMPUTER STORAGE MEDIUM
- Publication number 20100196627
- Publication date Aug 5, 2010
- TOKYO ELECTRON LIMITED
- Seiji Matsuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MODIFYING INSULATING FILM
- Publication number 20100105215
- Publication date Apr 29, 2010
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Forming Insulation Film
- Publication number 20100096707
- Publication date Apr 22, 2010
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Treating Method
- Publication number 20090163036
- Publication date Jun 25, 2009
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Forming Insulation Film
- Publication number 20080274370
- Publication date Nov 6, 2008
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate treating method and production method for semiconductor d...
- Publication number 20070235421
- Publication date Oct 11, 2007
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for producing material of electronic device
- Publication number 20070224837
- Publication date Sep 27, 2007
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process for producing materials for electronic device
- Publication number 20070218687
- Publication date Sep 20, 2007
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND MATERIAL FOR ELECTRONIC DEVICE
- Publication number 20070204959
- Publication date Sep 6, 2007
- TOKYO ELECTRON LTD.
- Toshio NAKANISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing method and computer storage medium
- Publication number 20070059944
- Publication date Mar 15, 2007
- TOKYO ELECTRON LIMITED
- Seiji Matsuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of modifying insulating film
- Publication number 20060199398
- Publication date Sep 7, 2006
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for forming underlying insulation film
- Publication number 20050255711
- Publication date Nov 17, 2005
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for producing material of electronic device
- Publication number 20050233599
- Publication date Oct 20, 2005
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process for producing materials for electronic device
- Publication number 20050176263
- Publication date Aug 11, 2005
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate treating method and production method for semiconductor d...
- Publication number 20050170543
- Publication date Aug 4, 2005
- Tokyo Electron Limited
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for forming insulation film
- Publication number 20050161434
- Publication date Jul 28, 2005
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate treating method
- Publication number 20050164523
- Publication date Jul 28, 2005
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for producing material of electronic device
- Publication number 20040142577
- Publication date Jul 22, 2004
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of producing electronic device material
- Publication number 20040048452
- Publication date Mar 11, 2004
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Seiji Matsuyama

Person

Patents Grantslast 30 patents

Plasma processing method

Method of modifying insulating film

Plasma processing method and computer storage medium

Substrate treating method and production method for semiconductor d...

Plasma processing method and computer storage medium

Method for forming insulation film

Method of modifying insulating film

Method for forming underlying insulation film

Substrate treating method

Method for forming insulation film

Nitriding method of gate oxide film

Substrate processing method and material for electronic device

Substrate processing method

Substrate treating method and production method for semiconductor d...

Substrate processing method

Process for producing materials for electronic device

Method of producing electronic device material

Patents Applicationslast 30 patents

PLASMA PROCESSING METHOD AND COMPUTER STORAGE MEDIUM

PLASMA PROCESSING METHOD AND COMPUTER STORAGE MEDIUM

METHOD OF MODIFYING INSULATING FILM

Method for Forming Insulation Film

Substrate Treating Method

Method for Forming Insulation Film

Substrate treating method and production method for semiconductor d...

Method for producing material of electronic device

Process for producing materials for electronic device

SUBSTRATE PROCESSING METHOD AND MATERIAL FOR ELECTRONIC DEVICE

Plasma processing method and computer storage medium

Method of modifying insulating film

Method for forming underlying insulation film

Method for producing material of electronic device

Process for producing materials for electronic device

Substrate treating method and production method for semiconductor d...

Method for forming insulation film

Substrate treating method

Method for producing material of electronic device

Method of producing electronic device material