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Kanagawa, JP
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last 30 patents
Information
Patent Grant
Pattern verifying method, pattern verifying device, program, and ma...
Patent number
8,397,182
Issue date
Mar 12, 2013
Renesas Electronics Corporation
Seiji Nagahara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Chemically amplified resist composition and manufacturing method of...
Patent number
7,534,554
Issue date
May 19, 2009
NEC Electronics Corporation
Seiji Nagahara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Chemically amplified resist composition, process for manufacturing...
Patent number
7,479,361
Issue date
Jan 20, 2009
NEC Electronics Corporation
Seiji Nagahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Exposure apparatus
Patent number
7,440,077
Issue date
Oct 21, 2008
NEC Electronics Corporation
Seiji Nagahara
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Chemically amplified resist composition and manufacturing method of...
Patent number
7,396,633
Issue date
Jul 8, 2008
NEC Electronics Corporation
Seiji Nagahara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor device and method of manufacturing the same
Patent number
7,217,654
Issue date
May 15, 2007
NEC Electronics Corporation
Seiji Nagahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical amplification type photoresist composition, method for pro...
Patent number
6,800,551
Issue date
Oct 5, 2004
NEC Electronics Corporation
Seiji Nagahara
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Pattern verifying method, pattern verifying device, program, and ma...
Publication number
20090298205
Publication date
Dec 3, 2009
NEC Electronics Corporation
Seiji Nagahara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROCESS FOR FORMING A PATTERN INCLUDING ON A SEMICONDUCTOR DEVICE
Publication number
20090075482
Publication date
Mar 19, 2009
NEC ELECTRONICS CORPORATION
Seiji NAGAHARA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHEMICALLY AMPLIFIED RESIST COMPOSITION AND MANUFACTURING METHOD OF...
Publication number
20080233518
Publication date
Sep 25, 2008
NEC ELECTRONICS CORPORATION
Seiji Nagahara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Semiconductor device and method of manufacturing the same
Publication number
20070096331
Publication date
May 3, 2007
NEC ELECTRONICS CORPORATION
Seiji Nagahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Exposure apparatus
Publication number
20060152695
Publication date
Jul 13, 2006
NEC Electronics Corporation
Seiji Nagahara
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Semiconductor device and method of manufacturing the same
Publication number
20050124168
Publication date
Jun 9, 2005
NEC ELECTRONICS CORPORATION
Seiji Nagahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Chemically amplified resist composition and manufacturing method of...
Publication number
20040259029
Publication date
Dec 23, 2004
NEC ELECTRONICS CORPORATION
Seiji Nagahara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Chemically amplified resist composition, process for manufacturing...
Publication number
20040259373
Publication date
Dec 23, 2004
NEC Electronics Corporation
Seiji Nagahara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Semiconductor device and method of manufacturing the same
Publication number
20030170993
Publication date
Sep 11, 2003
Seiji Nagahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Chemical amplification type photoresist composition, method for pro...
Publication number
20030157806
Publication date
Aug 21, 2003
NEC ELECTRONICS CORPORATION
Seiji Nagahara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY