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Seiji Nishikawa
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for producing silicon nitride film
Patent number
8,889,568
Issue date
Nov 18, 2014
Mitsubishi Heavy Industries, Ltd.
Seiji Nishikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Device for mounting an electronic part
Patent number
5,193,220
Issue date
Mar 9, 1993
NEC Corporation
Makoto Ichinohe
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Dual plate antenna
Patent number
5,079,559
Issue date
Jan 7, 1992
NEC Corporation
Shinjiro Umetsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Receiver for personal radio paging service
Patent number
5,054,120
Issue date
Oct 1, 1991
Kokusai Electric Co., Ltd.
Katsumi Ushiyama
G08 - SIGNALLING
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING SYSTEM
Publication number
20140057459
Publication date
Feb 27, 2014
Mitsubishi Heavy Industries, Ltd.
Tadashi Shimazu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR PRODUCING SILICON NITRIDE FILM
Publication number
20130109154
Publication date
May 2, 2013
Mitsubishi Heavy Industries, Ltd.
Seiji Nishikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INDUCTIVELY COUPLED PLASMA GENERATION DEVICE
Publication number
20130088146
Publication date
Apr 11, 2013
Mitsubishi Heavy Industries, Ltd.
Ryuichi Matsuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SILICON NITRIDE FILM OF SEMICONDUCTOR ELEMENT, AND METHOD AND APPAR...
Publication number
20130075875
Publication date
Mar 28, 2013
Mitsubishi Heavy Industries, Ltd.
Seiji Nishikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SILICON NITRIDE FILM FOR SEMICONDUCTOR ELEMENT, AND METHOD AND APPA...
Publication number
20130071671
Publication date
Mar 21, 2013
Mitsubishi Heavy Industries, Ltd.
Seiji Nishikawa
B32 - LAYERED PRODUCTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING SYSTEM
Publication number
20100310791
Publication date
Dec 9, 2010
Mitsubishi Heavy Industries, Ltd.
Tadashi Shimazu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA FILM FORMING APPARATUS
Publication number
20100236482
Publication date
Sep 23, 2010
Mitsubishi Heavy Industries, Ltd.
Hidetaka Kafuku
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...