Seiji Otani

Person

Hitachinaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Inspection apparatus and inspection method
- Patent number 8,345,233
- Issue date Jan 1, 2013
- Hitachi High-Technologies Corporation
- Tadashi Suga
- G01 - MEASURING TESTING
Information Patent Grant
Method of apparatus for detecting particles on a specimen
- Patent number 8,289,507
- Issue date Oct 16, 2012
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Optical apparatus for defect inspection
- Patent number 8,154,717
- Issue date Apr 10, 2012
- Hitachi High-Technologies Corporation
- Seiji Otani
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus and inspection method
- Patent number 8,102,522
- Issue date Jan 24, 2012
- Hitachi High-Technologies Corporation
- Tadashi Suga
- G01 - MEASURING TESTING
Information Patent Grant
Method of apparatus for detecting particles on a specimen
- Patent number 7,952,700
- Issue date May 31, 2011
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Method of apparatus for detecting particles on a specimen
- Patent number 7,817,261
- Issue date Oct 19, 2010
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Optical apparatus for defect inspection
- Patent number 7,787,115
- Issue date Aug 31, 2010
- Hitachi High-Technologies Corporation
- Seiji Otani
- G01 - MEASURING TESTING
Information Patent Grant
Optical apparatus for defect inspection
- Patent number 7,557,913
- Issue date Jul 7, 2009
- Hitachi High-Technologies Coropration
- Seiji Otani
- G01 - MEASURING TESTING
Information Patent Grant
Method of apparatus for detecting particles on a specimen
- Patent number 7,369,223
- Issue date May 6, 2008
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD
- Publication number 20120140212
- Publication date Jun 7, 2012
- Hitachi High-Technologies Corporation
- Tadashi Suga
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF APPARATUS FOR DETECTING PARTICLES ON A SPECIMEN
- Publication number 20110228258
- Publication date Sep 22, 2011
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF APPARATUS FOR DETECTING PARTICLES ON A SPECIMEN
- Publication number 20110032515
- Publication date Feb 10, 2011
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL APPARATUS FOR DEFECT INSPECTION
- Publication number 20100315626
- Publication date Dec 16, 2010
- Hitachi High-Technologies Corporation
- Seiji Otani
- G01 - MEASURING TESTING
Information Patent Application
Inspection apparatus and inspection method
- Publication number 20090262339
- Publication date Oct 22, 2009
- Tadashi Suga
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL APPARATUS FOR DEFECT INSPECTION
- Publication number 20090251690
- Publication date Oct 8, 2009
- Hitachi High-Technologies Corporation
- Seiji Otani
- G01 - MEASURING TESTING
Information Patent Application
Method Of Apparatus For Detecting Particles On A Specimen
- Publication number 20080204724
- Publication date Aug 28, 2008
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
Optical apparatus for defect inspection
- Publication number 20080002195
- Publication date Jan 3, 2008
- Hitachi High-Technologies Corporation
- Seiji Otani
- G01 - MEASURING TESTING
Information Patent Application
Method of apparatus for detecting particles on a specimen
- Publication number 20050213086
- Publication date Sep 29, 2005
- Akira Hamamatsu
- G01 - MEASURING TESTING

Seiji Otani

Person

Patents Grantslast 30 patents

Inspection apparatus and inspection method

Method of apparatus for detecting particles on a specimen

Optical apparatus for defect inspection

Inspection apparatus and inspection method

Method of apparatus for detecting particles on a specimen

Method of apparatus for detecting particles on a specimen

Optical apparatus for defect inspection

Optical apparatus for defect inspection

Method of apparatus for detecting particles on a specimen

Patents Applicationslast 30 patents

INSPECTION APPARATUS AND INSPECTION METHOD

METHOD OF APPARATUS FOR DETECTING PARTICLES ON A SPECIMEN

METHOD OF APPARATUS FOR DETECTING PARTICLES ON A SPECIMEN

OPTICAL APPARATUS FOR DEFECT INSPECTION

Inspection apparatus and inspection method

OPTICAL APPARATUS FOR DEFECT INSPECTION

Method Of Apparatus For Detecting Particles On A Specimen

Optical apparatus for defect inspection

Method of apparatus for detecting particles on a specimen