Seiji Wake

Person

Shizuoka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam lithography apparatus and charged particle be...
- Patent number 10,325,755
- Issue date Jun 18, 2019
- NuFlare Technology, Inc.
- Seiji Wake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam pattern forming apparatus and charged particl...
- Patent number 8,502,175
- Issue date Aug 6, 2013
- Nuflare Technology, Inc.
- Noriaki Nakayamada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam writing apparatus and method thereof
- Patent number 8,178,856
- Issue date May 15, 2012
- Nuflare Technology, Inc.
- Noriaki Nakayamada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged-particle beam writing method and charged-particle beam writ...
- Patent number 8,129,698
- Issue date Mar 6, 2012
- Nuflare Technology, Inc.
- Noriaki Nakayamada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Pattern writing circuit self-diagnosis method for charged beam phot...
- Patent number 7,900,185
- Issue date Mar 1, 2011
- Nuflare Technology, Inc.
- Hayato Kimura
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged-particle beam lithography with grid matching for correction...
- Patent number 7,652,271
- Issue date Jan 26, 2010
- Nuflare Technology, Inc.
- Seiji Wake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Writing error diagnosis method for charged particle beam photolitho...
- Patent number 7,598,504
- Issue date Oct 6, 2009
- Nuflare Technology, Inc.
- Hayato Kimura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS AND CHARGED PARTICLE BE...
- Publication number 20180197717
- Publication date Jul 12, 2018
- NuFlare Technology, Inc.
- Seiji WAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM PATTERN FORMING APPARATUS AND CHARGED PARTICL...
- Publication number 20120007002
- Publication date Jan 12, 2012
- NuFlare Technology, Inc.
- Noriaki NAKAYAMADA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD THEREOF
- Publication number 20110031387
- Publication date Feb 10, 2011
- NuFlare Technology, Inc.
- Noriaki NAKAYAMADA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED-PARTICLE BEAM WRITING METHOD AND CHARGED-PARTICLE BEAM WRIT...
- Publication number 20090242787
- Publication date Oct 1, 2009
- NuFlare Technology, Inc.
- Noriaki NAKAYAMADA
- B82 - NANO-TECHNOLOGY
Information Patent Application
PATTERN WRITING CIRCUIT SELF-DIAGNOSIS METHOD FOR CHARGED BEAM PHOT...
- Publication number 20080067426
- Publication date Mar 20, 2008
- NuFlare Technology, Inc.
- Hayato Kimura
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED-PARTICLE BEAM LITHOGRAPHY WITH GRID MATCHING FOR CORRECTION...
- Publication number 20080067441
- Publication date Mar 20, 2008
- NuFlare Technology, Inc.
- Seiji WAKE
- B82 - NANO-TECHNOLOGY
Information Patent Application
WRITING ERROR DIAGNOSIS METHOD FOR CHARGED PARTICLE BEAM PHOTOLITHO...
- Publication number 20080067423
- Publication date Mar 20, 2008
- NuFlare Technology, Inc.
- Hayato Kimura
- B82 - NANO-TECHNOLOGY

Person

Patents Grantslast 30 patents

Charged particle beam lithography apparatus and charged particle be...

Charged particle beam pattern forming apparatus and charged particl...

Charged particle beam writing apparatus and method thereof

Charged-particle beam writing method and charged-particle beam writ...

Pattern writing circuit self-diagnosis method for charged beam phot...

Charged-particle beam lithography with grid matching for correction...

Writing error diagnosis method for charged particle beam photolitho...

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS AND CHARGED PARTICLE BE...

CHARGED PARTICLE BEAM PATTERN FORMING APPARATUS AND CHARGED PARTICL...

CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD THEREOF

CHARGED-PARTICLE BEAM WRITING METHOD AND CHARGED-PARTICLE BEAM WRIT...

PATTERN WRITING CIRCUIT SELF-DIAGNOSIS METHOD FOR CHARGED BEAM PHOT...

CHARGED-PARTICLE BEAM LITHOGRAPHY WITH GRID MATCHING FOR CORRECTION...

WRITING ERROR DIAGNOSIS METHOD FOR CHARGED PARTICLE BEAM PHOTOLITHO...