Seiki Ishida

Person

Kumamoto-Ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate liquid processing apparatus
- Patent number 10,290,518
- Issue date May 14, 2019
- Tokyo Electron Limited
- Kento Kurusu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,889,476
- Issue date Feb 13, 2018
- Tokyo Electron Limited
- Seiki Ishida
- B08 - CLEANING
Information Patent Grant
Coating and developing system and coating and developing method
- Patent number 9,052,610
- Issue date Jun 9, 2015
- Tokyo Electron Limited
- Seiki Ishida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus
- Patent number 8,443,513
- Issue date May 21, 2013
- Tokyo Electron Limited
- Seiki Ishida
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing system
- Patent number 8,303,232
- Issue date Nov 6, 2012
- Tokyo Electron Limited
- Seiki Ishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing system and coating and developing method
- Patent number 8,154,106
- Issue date Apr 10, 2012
- Tokyo Electron Limited
- Seiki Ishida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing system
- Patent number 8,033,244
- Issue date Oct 11, 2011
- Tokyo Electron Limited
- Junya Minamida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus, coating and developing method and...
- Patent number 7,809,460
- Issue date Oct 5, 2010
- Tokyo Electron Limited
- Seiki Ishida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate carrying apparatus, substrate carrying method, and coatin...
- Patent number 7,563,042
- Issue date Jul 21, 2009
- Tokyo Electron Limited
- Masahiro Nakaharada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing system and coating and developing method
- Patent number 7,284,917
- Issue date Oct 23, 2007
- Tokyo Electron Limited
- Seiki Ishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid coating apparatus with temperature controlling manifold
- Patent number 6,620,245
- Issue date Sep 16, 2003
- Tokyo Electron Limited
- Seiki Ishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for coating treatment
- Patent number 6,579,370
- Issue date Jun 17, 2003
- Tokyo Electron Limited
- Yoshio Kimura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20160336170
- Publication date Nov 17, 2016
- TOKYO ELECTRON LIMITED
- Seiki Ishida
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160225644
- Publication date Aug 4, 2016
- TOKYO ELECTRON LIMITED
- Seiki Ishida
- B08 - CLEANING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS
- Publication number 20160064259
- Publication date Mar 3, 2016
- TOKYO ELECTRON LIMITED
- Kento KURUSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING SYSTEM AND COATING AND DEVELOPING METHOD
- Publication number 20120156626
- Publication date Jun 21, 2012
- TOKYO ELECTRON LIMITED
- Seiki ISHIDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20110078898
- Publication date Apr 7, 2011
- TOKYO ELECTRON LIMITED
- Seiki ISHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20100129182
- Publication date May 27, 2010
- TOKYO ELECTRON LIMITED
- SEIKI ISHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20100108095
- Publication date May 6, 2010
- TOKYO ELECTRON LIMITED
- Nobuhiko MOURI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20090151631
- Publication date Jun 18, 2009
- TOKYO ELECTRON LIMITED
- Junya MINAMIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate carrying apparatus, sustrate carrying method, and coating...
- Publication number 20070195297
- Publication date Aug 23, 2007
- Masahiro Nakaharada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD AND...
- Publication number 20070134600
- Publication date Jun 14, 2007
- TOKYO ELECTRON LIMITED
- Seiki ISHIDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING SYSTEM AND COATING AND DEVELOPING METHOD
- Publication number 20070122737
- Publication date May 31, 2007
- TOKYO ELECTRON LIMITED
- Seiki ISHIDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Coating and developing system and coating and developing method
- Publication number 20060177586
- Publication date Aug 10, 2006
- TOKYO ELECTRON LIMITED
- Seiki Ishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus
- Publication number 20020011208
- Publication date Jan 31, 2002
- Seiki Ishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for coating treatment
- Publication number 20020006577
- Publication date Jan 17, 2002
- TOKYO ELECTRON LIMITED
- Yoshio Kimura
- H01 - BASIC ELECTRIC ELEMENTS

Seiki Ishida

Person

Patents Grantslast 30 patents

Substrate liquid processing apparatus

Substrate processing apparatus and substrate processing method

Coating and developing system and coating and developing method

Substrate processing apparatus

Substrate processing system

Coating and developing system and coating and developing method

Substrate processing system

Coating and developing apparatus, coating and developing method and...

Substrate carrying apparatus, substrate carrying method, and coatin...

Coating and developing system and coating and developing method

Liquid coating apparatus with temperature controlling manifold

Apparatus and method for coating treatment

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE LIQUID PROCESSING APPARATUS

COATING AND DEVELOPING SYSTEM AND COATING AND DEVELOPING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE CLEANING METHOD

SUBSTRATE PROCESSING SYSTEM

Substrate carrying apparatus, sustrate carrying method, and coating...

COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD AND...

COATING AND DEVELOPING SYSTEM AND COATING AND DEVELOPING METHOD

Coating and developing system and coating and developing method

Substrate processing apparatus

Apparatus and method for coating treatment