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Seiki Takaya
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Kanagawa, JP
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last 30 patents
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Patent Grant
Method for vaporizing and supplying organometal compounds
Patent number
5,377,616
Issue date
Jan 3, 1995
Stec, Inc.
Hiroshi Mihira
C30 - CRYSTAL GROWTH
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Patent Grant
Apparatus for vaporizing and supplying organometal compounds
Patent number
5,160,542
Issue date
Nov 3, 1992
STEC Inc.
Hiroshi Mihira
C30 - CRYSTAL GROWTH