Seiko Hitomi

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for estimating shape before shrink and CD-SEM apparatus
- Patent number 9,830,524
- Issue date Nov 28, 2017
- Hitachi High-Technologies Corporation
- Tomoko Sekiguchi
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR ESTIMATING SHAPE BEFORE SHRINK AND CD-SEM APPARATUS
- Publication number 20150036914
- Publication date Feb 5, 2015
- Hitachi High-Technologies Corporation
- Tomoko Sekiguchi
- G06 - COMPUTING CALCULATING COUNTING