Seiro Murakami

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and methods utilizing plural mask and object sta...
- Patent number 6,894,763
- Issue date May 17, 2005
- Nikon Corporation
- Seiro Murakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus wherein focusing of the apparatus is...
- Patent number RE38320
- Issue date Nov 18, 2003
- Nikon Corporation
- Kenji Nishi
- 355 - Photocopying
Information Patent Grant
Exposure method and apparatus
- Patent number 6,608,681
- Issue date Aug 19, 2003
- Nikon Corporation
- Yasuaki Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of driving mask stage and method of mask alignment
- Patent number RE38113
- Issue date May 6, 2003
- Nikon Corporation
- Kenji Nishi
- 430 - Radiation imagery chemistry: process, composition, or product thereof
Information Patent Grant
Exposure method and apparatus
- Patent number 6,433,872
- Issue date Aug 13, 2002
- Nikon Corporation
- Kenji Nishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus wherein focusing of the apparatus is...
- Patent number 5,883,704
- Issue date Mar 16, 1999
- Nikon Corporation
- Kenji Nishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus correcting tilt of telecentricity
- Patent number 5,739,899
- Issue date Apr 14, 1998
- Nikon Corporation
- Kenji Nishi
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Exposure method and apparatus
- Patent number 5,693,439
- Issue date Dec 2, 1997
- Nikon Corporation
- Yasuaki Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of driving mask stage and method of mask alignment
- Patent number 5,464,715
- Issue date Nov 7, 1995
- Nikon Corporation
- Kenji Nishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and apparatus
- Patent number 5,448,332
- Issue date Sep 5, 1995
- Nikon Corporation
- Yasuyuki Sakakibara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for detecting position of reference pattern
- Patent number 4,860,374
- Issue date Aug 22, 1989
- Nikon Corporation
- Seiro Murakami
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Position detecting system
- Patent number 4,702,606
- Issue date Oct 27, 1987
- Nippon Kogaku K.K.
- Toshio Matsuura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment apparatus
- Patent number 4,677,301
- Issue date Jun 30, 1987
- Nippon Kogaku K.K.
- Akikazu Tanimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection method and apparatus
- Patent number 4,655,598
- Issue date Apr 7, 1987
- Nippon Kogaku K.K.
- Seiro Murakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for detecting an edge position of a pattern an...
- Patent number 4,639,604
- Issue date Jan 27, 1987
- Nippon Kagaku K.K.
- Seiro Murakami
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Exposure apparatus and methods utilizing plural mask and object sta...
- Publication number 20030218730
- Publication date Nov 27, 2003
- NIKON CORPORATION
- Seiro Murakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection exposure apparatus
- Publication number 20030164933
- Publication date Sep 4, 2003
- Nikon Corporation
- Kenji Nishi
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Exposure method and apparatus
- Publication number 20020176082
- Publication date Nov 28, 2002
- NIKON CORPORATION
- Yasuyuki Sakakibara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Seiro Murakami

Person

Patents Grantslast 30 patents

Exposure apparatus and methods utilizing plural mask and object sta...

Projection exposure apparatus wherein focusing of the apparatus is...

Exposure method and apparatus

Method of driving mask stage and method of mask alignment

Exposure method and apparatus

Projection exposure apparatus wherein focusing of the apparatus is...

Projection exposure apparatus correcting tilt of telecentricity

Exposure method and apparatus

Method of driving mask stage and method of mask alignment

Exposure method and apparatus

Apparatus for detecting position of reference pattern

Position detecting system

Alignment apparatus

Position detection method and apparatus

Method and apparatus for detecting an edge position of a pattern an...

Patents Applicationslast 30 patents

Exposure apparatus and methods utilizing plural mask and object sta...

Projection exposure apparatus

Exposure method and apparatus