Seiya Fujimoto

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Koshi-shi, Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 11,862,486
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Kazuki Kosai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 10,770,316
- Issue date Sep 8, 2020
- Tokyo Electron Limited
- Kazuki Kosai
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,685,858
- Issue date Jun 16, 2020
- Tokyo Electron Limited
- Hiroyuki Higashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230005763
- Publication date Jan 5, 2023
- TOKYO ELECTRON LIMITED
- Kazuki KOSAI
- B08 - CLEANING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20200365424
- Publication date Nov 19, 2020
- TOKYO ELECTRON LIMITED
- Kazuki Kosai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190006206
- Publication date Jan 3, 2019
- TOKYO ELECTRON LIMITED
- Hiroyuki Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20180337067
- Publication date Nov 22, 2018
- TOKYO ELECTRON LIMITED
- Kazuki Kosai
- H01 - BASIC ELECTRIC ELEMENTS