Seiya Totsuka

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Solution supply apparatus and solution supply method
- Patent number 11,433,420
- Issue date Sep 6, 2022
- Tokyo Electron Limited
- Ryouichirou Naitou
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing method, substrate processing apparatus and sto...
- Patent number 10,295,903
- Issue date May 21, 2019
- Tokyo Electron Limited
- Shinichi Hatakeyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Bubble removing method, bubble removing apparatus, degassing appara...
- Patent number 9,649,577
- Issue date May 16, 2017
- Tokyo Electron Limited
- Tomohiro Iseki
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
SOLUTION SUPPLY APPARATUS AND SOLUTION SUPPLY METHOD
- Publication number 20200290080
- Publication date Sep 17, 2020
- Tokyo Electron Limited
- Ryouichirou NAITOU
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND STO...
- Publication number 20180059539
- Publication date Mar 1, 2018
- TOKYO ELECTRON LIMITED
- Shinichi Hatakeyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BUBBLE REMOVING METHOD, BUBBLE REMOVING APPARATUS, DEGASSING APPARA...
- Publication number 20150096441
- Publication date Apr 9, 2015
- TOKYO ELECTRON LIMITED
- Tomohiro Iseki
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL