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Sejin OH
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Hwaseong-si, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma control device and plasma processing system
Patent number
11,984,297
Issue date
May 14, 2024
Samsung Electronics Co., Ltd.
Sejin Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and semiconductor device manufacturing...
Patent number
11,929,239
Issue date
Mar 12, 2024
Samsung Electronics Co., Ltd.
Sejin Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, substrate processing method, and me...
Patent number
10,892,145
Issue date
Jan 12, 2021
Samsung Electronics Co., Ltd.
Sejin Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of fabricating semiconductor devices including performing a...
Patent number
9,691,618
Issue date
Jun 27, 2017
Samsung Electronics Co., Ltd.
Dougyong Sung
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS FOR MEASURING RADICAL DENSITY DISTRIBUTION BASED ON LIGHT...
Publication number
20240159657
Publication date
May 16, 2024
Samsung Electronics Co., Ltd.
Sejin OH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA GENERATOR, PLASMA PROCESSING DEVICE, AND METHOD OF MANUFACTU...
Publication number
20230117953
Publication date
Apr 20, 2023
Samsung Electronics Co., Ltd.
Sejin OH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE FOR MEASURING DENSITY OF PLASMA, PLASMA PROCESSING SYSTEM, A...
Publication number
20230102201
Publication date
Mar 30, 2023
Samsung Electronics Co., Ltd.
Vladimir Vsevolodovich PROTOPOPOV
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA CONTROL DEVICE AND PLASMA PROCESSING SYSTEM
Publication number
20230091161
Publication date
Mar 23, 2023
Samsung Electronics Co., Ltd.
Sejin OH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING APPARATUS AND SEMICONDUCTOR PROCESSING SYSTEM
Publication number
20230078095
Publication date
Mar 16, 2023
Samsung Electronics Co., Ltd.
Dougyong SUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING...
Publication number
20220223385
Publication date
Jul 14, 2022
Samsung Electronics Co., Ltd.
Sejin Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR MONITORING SUBSTRATE PROCESSING APPARATUS
Publication number
20220199374
Publication date
Jun 23, 2022
Samsung Electronics Co., Ltd.
SEJIN OH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...
Publication number
20200168443
Publication date
May 28, 2020
Samsung Electronics Co., Ltd.
SEJIN OH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ATOMIC LAYER ETCHING AND METHOD OF FABRICATING SEMICONDUC...
Publication number
20180114700
Publication date
Apr 26, 2018
Samsung Electronics Co., Ltd.
Je-Hun WOO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA SYSTEM, PLASMA PROCESSING METHOD, AND PLASMA ETCHING METHOD
Publication number
20170186586
Publication date
Jun 29, 2017
Samsung Electronics Co., Ltd.
Sejin Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF FABRICATING SEMICONDUCTOR DEVICES INCLUDING PERFORMING A...
Publication number
20170140937
Publication date
May 18, 2017
Samsung Electronics Co., Ltd.
Dougyong SUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR MONITORING VACUUM ULTRAVIOLET AND PLASMA PROCESS EQUI...
Publication number
20160379802
Publication date
Dec 29, 2016
Samsung Electronics Co., Ltd.
Sejin OH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate Processing System and Ceramic Coating Method Therefor
Publication number
20160307740
Publication date
Oct 20, 2016
Samsung Electronics Co., Ltd.
Jungmin Kim
H01 - BASIC ELECTRIC ELEMENTS