Semyon Shertinsky

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San Francisco, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck with improved erosion resistance
- Patent number 6,023,405
- Issue date Feb 8, 2000
- Applied Materials, Inc.
- Shamouil Shamouilian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck with improved erosion resistance
- Patent number 5,822,171
- Issue date Oct 13, 1998
- Applied Materials, Inc.
- Shamouil Shamouilian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...