Sen-Hong Syue

Person

Zhubei City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Device and method for high pressure anneal
- Patent number 12,183,573
- Issue date Dec 31, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a nano-FET semiconductor device
- Patent number 12,040,382
- Issue date Jul 16, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Li-Chi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of forming same
- Patent number 11,996,412
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure and method of forming the same
- Patent number 11,978,676
- Issue date May 7, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming semiconductor device having isolation structures...
- Patent number 11,923,235
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Cheng-Ta Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method
- Patent number 11,923,432
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yoh-Rong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transistor isolation regions and methods of forming the same
- Patent number 11,908,751
- Issue date Feb 20, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shallow trench isolation forming method and structures resulting th...
- Patent number 11,901,218
- Issue date Feb 13, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for high pressure anneal
- Patent number 11,854,800
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Implantation and annealing for semiconductor device
- Patent number 11,640,986
- Issue date May 2, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Chang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of forming same
- Patent number 11,605,635
- Issue date Mar 14, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method
- Patent number 11,545,559
- Issue date Jan 3, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yoh-Rong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming semiconductor device having isolation structures...
- Patent number 11,450,555
- Issue date Sep 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Cheng-Ta Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shallow trench isolation forming method and structures resulting th...
- Patent number 11,302,567
- Issue date Apr 12, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Implantation and annealing for semiconductor device
- Patent number 11,056,573
- Issue date Jul 6, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Chang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for high pressure anneal
- Patent number 11,037,781
- Issue date Jun 15, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having isolation structures with different thi...
- Patent number 10,950,490
- Issue date Mar 16, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Cheng-Ta Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having isolation structures with different thi...
- Patent number 10,157,770
- Issue date Dec 18, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Cheng-Ta Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure and method
- Patent number 9,945,048
- Issue date Apr 17, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sen-Hong Syue
- C30 - CRYSTAL GROWTH
Information Patent Grant
Fin field effect transistor and method for fabricating the same
- Patent number 9,929,268
- Issue date Mar 27, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chii-Ming Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mechanism of forming a trench structure
- Patent number 9,396,986
- Issue date Jul 19, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer alignment system and method
- Patent number 8,932,945
- Issue date Jan 13, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sen-Hong Syue
- G11 - INFORMATION STORAGE
Information Patent Grant
Method of forming a shallow trench isolation structure
- Patent number 7,947,551
- Issue date May 24, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sen-Hong Syue
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE
- Publication number 20240405096
- Publication date Dec 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yun Chen Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSISTOR ISOLATION REGIONS
- Publication number 20240379461
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE STRUCTURE WITH EXPANSION FILM AND METHOD FOR F...
- Publication number 20240355927
- Publication date Oct 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Szu-Ying CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING A NANO-FET SEMICONDUCTOR DEVICE
- Publication number 20240332401
- Publication date Oct 3, 2024
- Tawan Semiconductor Manufacturing Co., Ltd.
- Li-Chi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FORMING SAME
- Publication number 20240274606
- Publication date Aug 15, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING THE SAME
- Publication number 20240266229
- Publication date Aug 8, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device and Method
- Publication number 20240194765
- Publication date Jun 13, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yoh-Rong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE
- Publication number 20240170341
- Publication date May 23, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Ming Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shallow Trench Isolation Forming Method and Structures Resulting Th...
- Publication number 20240136220
- Publication date Apr 25, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CMOS WELL REGIONS WITH HIGH DOPANT ACTIVATION LEVEL AND REDUCED EXT...
- Publication number 20240006246
- Publication date Jan 4, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Fan Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEV...
- Publication number 20230395701
- Publication date Dec 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Ming CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR HIGH PRESSURE ANNEAL
- Publication number 20230386832
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMATION METHOD OF SHALLOW TRENCH ISOLATION
- Publication number 20230377999
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Szu-Ying CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANNEALING APPARATUS AND METHOD OF OPERATING THE SAME
- Publication number 20230377914
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- YI-FAN CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSISTOR ISOLATION REGIONS AND METHODS OF FORMING THE SAME
- Publication number 20230378000
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE SPACER AND FORMATION METHOD THEREOF
- Publication number 20230299175
- Publication date Sep 21, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Rui CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device and Method
- Publication number 20230144899
- Publication date May 11, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yoh-Rong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANNEALING APPARATUS AND METHOD OF OPERATING THE SAME
- Publication number 20230060692
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- YI-FAN CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING THE SAME
- Publication number 20230038762
- Publication date Feb 9, 2023
- Taiwan Semiconductor Manufacturing CO.,LTD.
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANNEALING SYSTEM AND METHOD FOR USING THE SAME
- Publication number 20220415668
- Publication date Dec 29, 2022
- Taiwan Semiconductor Manufacturing Co., Lid.
- Yi-Fan Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device and Method of Forming Same
- Publication number 20220384436
- Publication date Dec 1, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING SEMICONDUCTOR DEVICE HAVING ISOLATION STRUCTURES...
- Publication number 20220367248
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Ta WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transistor Isolation Regions and Methods of Forming the Same
- Publication number 20220359311
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device and Method
- Publication number 20220336636
- Publication date Oct 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yoh-Rong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device and Method of Forming Same
- Publication number 20220278097
- Publication date Sep 1, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Nano-Fet Semiconductor Device and Method of Forming
- Publication number 20220262925
- Publication date Aug 18, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Li-Chi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shallow Trench Isolation Forming Method and Structures Resulting Th...
- Publication number 20220230910
- Publication date Jul 21, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHALLOW TRENCH ISOLATION FORMING METHOD AND STRUCTURES RESULTING TH...
- Publication number 20210407847
- Publication date Dec 30, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPLANTATION AND ANNEALING FOR SEMICONDUCTOR DEVICE
- Publication number 20210328044
- Publication date Oct 21, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device and Method for High Pressure Anneal
- Publication number 20210280414
- Publication date Sep 9, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS

Sen-Hong Syue

Person

Patents Grantslast 30 patents

Device and method for high pressure anneal

Method of forming a nano-FET semiconductor device

Semiconductor device and method of forming same

Semiconductor structure and method of forming the same

Method for forming semiconductor device having isolation structures...

Semiconductor device and method

Transistor isolation regions and methods of forming the same

Shallow trench isolation forming method and structures resulting th...

Device and method for high pressure anneal

Implantation and annealing for semiconductor device

Semiconductor device and method of forming same

Semiconductor device and method

Method for forming semiconductor device having isolation structures...

Shallow trench isolation forming method and structures resulting th...

Implantation and annealing for semiconductor device

Device and method for high pressure anneal

Semiconductor device having isolation structures with different thi...

Semiconductor device having isolation structures with different thi...

Semiconductor structure and method

Fin field effect transistor and method for fabricating the same

Mechanism of forming a trench structure

Wafer alignment system and method

Method of forming a shallow trench isolation structure

Patents Applicationslast 30 patents

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE

TRANSISTOR ISOLATION REGIONS

SEMICONDUCTOR DEVICE STRUCTURE WITH EXPANSION FILM AND METHOD FOR F...

METHOD OF FORMING A NANO-FET SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND METHOD OF FORMING SAME

SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING THE SAME

Semiconductor Device and Method

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE

Shallow Trench Isolation Forming Method and Structures Resulting Th...

CMOS WELL REGIONS WITH HIGH DOPANT ACTIVATION LEVEL AND REDUCED EXT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEV...

DEVICE AND METHOD FOR HIGH PRESSURE ANNEAL

FORMATION METHOD OF SHALLOW TRENCH ISOLATION

ANNEALING APPARATUS AND METHOD OF OPERATING THE SAME

TRANSISTOR ISOLATION REGIONS AND METHODS OF FORMING THE SAME

GATE SPACER AND FORMATION METHOD THEREOF

Semiconductor Device and Method

ANNEALING APPARATUS AND METHOD OF OPERATING THE SAME

SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING THE SAME

ANNEALING SYSTEM AND METHOD FOR USING THE SAME

Semiconductor Device and Method of Forming Same

METHOD FOR FORMING SEMICONDUCTOR DEVICE HAVING ISOLATION STRUCTURES...

Transistor Isolation Regions and Methods of Forming the Same

Semiconductor Device and Method

Semiconductor Device and Method of Forming Same

Nano-Fet Semiconductor Device and Method of Forming

Shallow Trench Isolation Forming Method and Structures Resulting Th...

SHALLOW TRENCH ISOLATION FORMING METHOD AND STRUCTURES RESULTING TH...

IMPLANTATION AND ANNEALING FOR SEMICONDUCTOR DEVICE

Device and Method for High Pressure Anneal