Sensho KOBAYASHI

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate transfer chamber and container connecting mechanism with...
- Patent number 10,229,847
- Issue date Mar 12, 2019
- Tokyo Electron Limited
- Shinji Wakabayashi
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Support information display method, maintenance support method of s...
- Patent number 9,810,905
- Issue date Nov 7, 2017
- Tokyo Electron Limited
- Toshiaki Kodama
- G02 - OPTICS
Information Patent Grant
Vacuum processing apparatus
- Patent number 9,443,749
- Issue date Sep 13, 2016
- Tokyo Electron Limited
- Shinji Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load lock device
- Patent number 9,228,685
- Issue date Jan 5, 2016
- Tokyo Electron Limited
- Sensho Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 9,230,842
- Issue date Jan 5, 2016
- Tokyo Electron Limited
- Sensho Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 9,147,591
- Issue date Sep 29, 2015
- Tokyo Electron Limited
- Sensho Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exhaust system for film forming apparatus
- Patent number 5,788,747
- Issue date Aug 4, 1998
- Tokyo Electron Limited
- Takashi Horiuchi
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSFER CHAMBER AND CONTAINER CONNECTING MECHANISM
- Publication number 20170154799
- Publication date Jun 1, 2017
- TOKYO ELECTRON LIMITED
- Shinji WAKABAYASHI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE COOLING MEMBER, SUBSTRATE PROCESSING DEVICE, AND SUBSTRAT...
- Publication number 20150255257
- Publication date Sep 10, 2015
- Tokyo Electron Limited
- Atsushi Kawabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING FILTRATION FILTER
- Publication number 20150246317
- Publication date Sep 3, 2015
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE TRANSFER CHAMBER AND CONTAINER CONNECTING MECHANISM
- Publication number 20150098788
- Publication date Apr 9, 2015
- TOKYO ELECTRON LIMITED
- Shinji WAKABAYASHI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUPPORT INFORMATION DISPLAY METHOD, MAINTENANCE SUPPORT METHOD OF S...
- Publication number 20140240484
- Publication date Aug 28, 2014
- TOKYO ELECTRON LIMITED
- Toshiaki KODAMA
- G02 - OPTICS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140003891
- Publication date Jan 2, 2014
- TOKYO ELECTRON LIMITED
- Sensho Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20130309045
- Publication date Nov 21, 2013
- TOKYO ELECTRON LIMITED
- Sensho Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20130302115
- Publication date Nov 14, 2013
- TOKYO ELECTRON LIMITED
- Shinji Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD LOCK DEVICE
- Publication number 20130248014
- Publication date Sep 26, 2013
- TOKYO ELECTRON LIMITED
- Sensho Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Sensho KOBAYASHI

Person

Patents Grantslast 30 patents

Substrate transfer chamber and container connecting mechanism with...

Support information display method, maintenance support method of s...

Vacuum processing apparatus

Load lock device

Substrate processing apparatus

Substrate processing apparatus

Exhaust system for film forming apparatus

Patents Applicationslast 30 patents

SUBSTRATE TRANSFER CHAMBER AND CONTAINER CONNECTING MECHANISM

SUBSTRATE COOLING MEMBER, SUBSTRATE PROCESSING DEVICE, AND SUBSTRAT...

METHOD FOR PRODUCING FILTRATION FILTER

SUBSTRATE TRANSFER CHAMBER AND CONTAINER CONNECTING MECHANISM

SUPPORT INFORMATION DISPLAY METHOD, MAINTENANCE SUPPORT METHOD OF S...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

VACUUM PROCESSING APPARATUS

LOAD LOCK DEVICE