Senthilkumar Arthanari

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Shallow trench isolation using non-conformal dielectric and planari...
- Patent number 6,541,349
- Issue date Apr 1, 2003
- International Business Machines Corporation
- Senthilkumar Arthanari
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Shallow trench isolation using non-conformal dielectric material an...
- Publication number 20020094649
- Publication date Jul 18, 2002
- International Business Machines Corporation
- Senthilkumar Arthanari
- H01 - BASIC ELECTRIC ELEMENTS