Senzi Li

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for post-etch cleans
- Patent number 8,058,181
- Issue date Nov 15, 2011
- Novellus Systems, Inc.
- David L. Chen
- B08 - CLEANING
Information Patent Grant
Method for post-etch cleans
- Patent number 7,569,492
- Issue date Aug 4, 2009
- Novellus Systems, Inc.
- David L. Chen
- B08 - CLEANING
Information Patent Grant
Methods for post etch cleans
- Patent number 7,390,755
- Issue date Jun 24, 2008
- Novellus Systems, Inc.
- David L. Chen
- B08 - CLEANING
Information Patent Grant
Method for removing photoresist from low-k films in a downstream pl...
- Patent number 6,693,043
- Issue date Feb 17, 2004
- Novellus Systems, Inc.
- Senzi Li
- H01 - BASIC ELECTRIC ELEMENTS