Seobong Chang

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Gyeonggi-do, KR

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Patents Grantslast 30 patents

Information Patent Grant
Precursors and methods for preparing silicon-containing films
- Patent number 12,071,688
- Issue date Aug 27, 2024
- Entegris, Inc.
- SangJin Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming carbon rich silicon-containing films
- Patent number 12,037,681
- Issue date Jul 16, 2024
- Entegris, Inc.
- Sungsil Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming carbon rich silicon-containing films
- Patent number 11,414,750
- Issue date Aug 16, 2022
- Entegris, Inc.
- Sungsil Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor dep...
- Patent number 10,872,770
- Issue date Dec 22, 2020
- Entegris, Inc.
- Sangbum Han
- C07 - ORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FORMING CARBON RICH SILICON-CONTAINING FILMS
- Publication number 20220364225
- Publication date Nov 17, 2022
- Entegris, Inc.
- Sungsil CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSORS AND METHODS FOR PREPARING SILICON-CONTAINING FILMS
- Publication number 20210301400
- Publication date Sep 30, 2021
- Entegris, Inc.
- SangJin LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HALOALKYNYL DICOBALT HEXACARBONYL PRECURSORS FOR CHEMICAL VAPOR DEP...
- Publication number 20210082708
- Publication date Mar 18, 2021
- Entegris, Inc.
- Sangbum HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING CARBON RICH SILICON-CONTAINING FILMS
- Publication number 20200354830
- Publication date Nov 12, 2020
- Entegris, Inc.
- Sungsil CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALOALKYNYL DICOBALT HEXACARBONYL PRECURSORS FOR CHEMICAL VAPOR DEP...
- Publication number 20180158687
- Publication date Jun 7, 2018
- Entegris, Inc.
- Sangbum Han
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...