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Seog-Min LEE
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Suwon-si, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus for processing wafers
Patent number
9,666,459
Issue date
May 30, 2017
Samsung Electronics Co., Ltd.
Cheol-Kyu Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Batch type apparatus for manufacturing semiconductor devices
Patent number
9,159,591
Issue date
Oct 13, 2015
Samsung Electronics Co., Ltd.
Cheol-Kyu Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing a dielectric film in a capacitor
Patent number
7,425,761
Issue date
Sep 16, 2008
Samsung Electronics Co., Ltd.
Jae-hyoung Choi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing equipment having mass flow controller
Patent number
7,140,384
Issue date
Nov 28, 2006
Samsung Electronics Co., Ltd.
Sung-Ho Kang
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS FOR PROCESSING WAFERS
Publication number
20140261174
Publication date
Sep 18, 2014
Samsung Electronics Co., Ltd.
Cheol-Kyu YANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of manufacturing a dielectric film in a capacitor
Publication number
20070099379
Publication date
May 3, 2007
Jae-hyoung Choi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Mass flow controller and gas supplying apparatus having the same
Publication number
20040261705
Publication date
Dec 30, 2004
Sung-Ho Kang
G05 - CONTROLLING REGULATING