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Hyogo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
TiN-based film and TiN-based film forming method
Patent number
10,927,453
Issue date
Feb 23, 2021
Tokyo Electron Limited
Tadahiro Ishizaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
10,864,548
Issue date
Dec 15, 2020
Tokyo Electron Limited
Hiroaki Ashizawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Microwave heat treatment apparatus and microwave heat treatment method
Patent number
10,529,598
Issue date
Jan 7, 2020
Tokyo Electron Limited
Seokhyoung Hong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming TiON film
Patent number
10,483,100
Issue date
Nov 19, 2019
Tokyo Electron Limited
Tadahiro Ishizaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Lower electrode of DRAM capacitor and manufacturing method thereof
Patent number
10,199,451
Issue date
Feb 5, 2019
Tokyo Electron Limited
Tadahiro Ishizaka
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
FILM FORMING METHOD, FILM FORMING DEVICE, AND METHOD FOR MANUFACTUR...
Publication number
20230037960
Publication date
Feb 9, 2023
Tokyo Electron Limited
Seokhyoung HONG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
Publication number
20200063258
Publication date
Feb 27, 2020
TOKYO ELECTRON LIMITED
Tsuyoshi TAKAHASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20180311700
Publication date
Nov 1, 2018
TOKYO ELECTRON LIMITED
Hiroaki Ashizawa
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
TiN-BASED FILM AND TiN-BASED FILM FORMING METHOD
Publication number
20180135169
Publication date
May 17, 2018
Tadahiro ISHIZAKA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOWER ELECTRODE OF DRAM CAPACITOR AND MANUFACTURING METHOD THEREOF
Publication number
20170179219
Publication date
Jun 22, 2017
Tadahiro ISHIZAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING TiON FILM
Publication number
20170092489
Publication date
Mar 30, 2017
TOKYO ELECTRON LIMITED
Tadahiro ISHIZAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROWAVE HEATING APPARATUS AND MICROWAVE HEATING METHOD
Publication number
20150305097
Publication date
Oct 22, 2015
TOKYO ELECTRON LIMITED
Mitsutoshi ASHIDA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MATCHING METHOD AND MICROWAVE HEATING METHOD
Publication number
20150144621
Publication date
May 28, 2015
TOKYO ELECTRON LIMITED
Seokhyoung HONG
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MICROWAVE HEAT TREATMENT APPARATUS AND MICROWAVE HEAT TREATMENT METHOD
Publication number
20150144622
Publication date
May 28, 2015
TOKYO ELECTRON LIMITED
Seokhyoung HONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROWAVE HEATING APPARATUS AND PROCESSING METHOD
Publication number
20150129586
Publication date
May 14, 2015
TOKYO ELECTRON LIMITED
Taro IKEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROWAVE HEATING APPARATUS AND PROCESSING METHOD
Publication number
20150090708
Publication date
Apr 2, 2015
TOKYO ELECTRON LIMITED
Sumi Tanaka
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MICROWAVE HEATING APPARATUS AND HEATING METHOD
Publication number
20140367377
Publication date
Dec 18, 2014
TOKYO ELECTRON LIMITED
Taichi MONDEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROWAVE HEAT TREATMENT METHOD
Publication number
20140283734
Publication date
Sep 25, 2014
TOKYO ELECTRON LIMITED
Taichi MONDEN
C30 - CRYSTAL GROWTH
Information
Patent Application
COLUMN FOR CHROMATOGRAPHY, METHOD FOR PRODUCING SAME, AND ANALYSIS...
Publication number
20120318049
Publication date
Dec 20, 2012
SHINWA CHEMICAL INDUSTRIES LIMITED
Seokhyoung Hong
G01 - MEASURING TESTING
Information
Patent Application
MICRO-CHANNEL DEVICE AND METHOD FOR FABRICATING MICRO-CHANNEL DEVICE
Publication number
20120034566
Publication date
Feb 9, 2012
TOKYO ELECTRON LIMITED
Hiroo Wada
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL