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Seong Chan KIM
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Carver, MN, US
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Patents Grants
last 30 patents
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Patent Grant
Flow modification fixture for an equipment front end module
Patent number
12,183,611
Issue date
Dec 31, 2024
Entegris, Inc.
Seong Chan Kim
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
FLOW MODIFICATION FIXTURE FOR AN EQUIPMENT FRONT END MODULE
Publication number
20250118582
Publication date
Apr 10, 2025
Entegris, Inc.
Seong Chan Kim
G05 - CONTROLLING REGULATING
Information
Patent Application
FLOW MODIFICATION FIXTURE FOR AN EQUIPMENT FRONT END MODULE
Publication number
20180174875
Publication date
Jun 21, 2018
Entegris, Inc.
Seong Chan KIM
G05 - CONTROLLING REGULATING